Parameterized layout synthesis, extraction, and SPICE simulation for MEMS

Foundations of Microelectromechanical System Synthesis

“…An approach will be developed which comes much closer to providing a schematic-like description for micromachined devices, but at the cost of narrowing the range of micromachined devices which can be so treated. So in that sense, this circuit-like description intended to make simulation easier is also a step towards top-down or structured design methodologies [46,47,48,49,50,51,52,53,54]. Developing a circuit representation for micromachined devices involves determining the list of elements for the circuit representation, the model for each element, and the definition of the nature or discipline for the terminals of the elements.…”

Structured design of integrated MEMS

“…al. at U. C. Berkeley [7] and Antonsson at Caltech [8]. Suspended MEMS span a wide range of applications including pressure sensors, accelerometers, gyroscopes, resonators, relays, fjlters, variable capacitors, micromirrors, microactuators for data storage, and acoustic and ultrasonic transducers.…”

Newton: a library-based analytical synthesis tool for RF-MEMS resonators

“…Without damping, the solution is [9], (4) where k m is the mechanical stiffness of the resonating body and m is its mass. In [6], it has been shown how (3) and (4) can be evaluated for the case of the CCB and an arbitrary mode, (5) where f n is the n th resonant mode, E is Young's modulus, I is the moment of inertia, is the density of the material, and A is the cross-sectional area where A = W r h r .…”

“…A parameterized layout generator for low frequency lateral MEMS resonators was presented in [4]. Here, parameters such as the device resonant frequency were used to solve simple mechanical relationships from which the device geometry could be determined, thus determining the physical design.…”