Patterning of indium–tin oxide on glass with picosecond lasers

Račiukaitis, Gediminas; Brikas, Marijus; Gedvilas, Mindaugas; Rakickas, Tomas

doi:10.1016/j.apsusc.2007.01.099

Cited by 77 publications

(34 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Molybdenum and carbon were found at the background level. The 355 nm radiation was badly absorbed by ITO and thermal exfoliation prevailed [8]. The surface of the CIGS layer shows some marks of melting in the central part of the trench.…”

Section: Exposition Of the Backcontact By Removal Of The Absorber Filmentioning

confidence: 99%

“…Our goal is to develop the flexible and rapid laser technology for precise structuring of the CIGS solar cells compatible with the roll-to-roll production line. We used the laser with the picosecond pulse duration in shaping the simple thin-films structures deposited on glass [8,9] and polymer substrates [10]. They revealed potential of picosecond lasers in selective structuring of thin films when the wavelength of laser radiation was adjusted depending on optical properties both of the film and the substrate.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Laser structuring of thin-film solar cells on polymers

Gečys¹,

Račiukaitis²,

Gedvilas³

et al. 2009

Eur. Phys. J. Appl. Phys.

View full text Add to dashboard Cite

Abstract.A permanent growth of the thin-film electronics market stimulates the development of versatile technologies for patterning thin-film materials on flexible substrates. High repetition rate lasers with a short pulse duration offer new possibilities for high efficiency structuring of conducting, semi-conducting and isolating films. Lasers with the picosecond pulse duration were applied in structuring the complex multilayered Cu(InGa)Se 2 (CIGS) solar cells deposited on the polyimide substrate. The wavelength of laser radiation was adjusted depending on optical properties both of the film and the substrate. A narrow processing window of laser fluence and pulse overlap was estimated with both 1064 nm and 355 nm irradiation to remove the molybdenum backcontact off the substrate. The selective removal of ITO, ZnO and CIGS layers was achieved with 355 nm irradiation in the multilayer structure of CIGS without significant damage to the underneath layers. Use of the flat-top laser beam profile should prevent inhomogeneity in ablation. The EDS analysis did not show residues of molybdenum projected onto the walls of ablated channel due to melt extrusion. Processing with picosecond lasers should not cause degradation of photo-electrical properties of the solar cells but verification is required.

show abstract

Section: Exposition Of the Backcontact By Removal Of The Absorber Filmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Laser structuring of thin-film solar cells on polymers

Gečys¹,

Račiukaitis²,

Gedvilas³

et al. 2009

Eur. Phys. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…Structuring of ITO films has a great impetus from industrial applications. Accordingly, laser patterning of ITO thin films on glass substrates has been extensively studied with various pulsed laser sources [22][23][24][25][26][27][28][29][30][31][32][33][34][35][36]. However, a detailed study of the incubation behavior of ITO films and its influence on laser patterning has not yet been reported.…”

mentioning

confidence: 99%

Incubation effect and its influence on laser patterning of ITO thin film

2012

View full text Add to dashboard Cite

“…There are only fragmental results on laser scribing in the thin-film a-Si solar cells on flexible substrates. Lasers with a shorter, picosecond pulse duration were successfully applied in scribing the monolayer thin film structures deposited on glass [5,6] and polymer substrates [7]. The technique was also applied in scribing films for the CIGS solar cells [8].…”

Section: Introductionmentioning

confidence: 99%