Patterning of porous silicon nanostructures and eliminating microcracks on silicon nitride mask using metal assisted chemical etching

Synthesis and Properties of “Black Silicon” Formed by Pd-Catalyst Etching in NH4HF2/H2O2Solution

“…12b have also been produced using the Pd-catalyst etching technique by several authors. [9][10][11][12][13][14] We also measured the optical transmittance and PL spectra of the Pd-etched Si sample in the HF/H 2 O 2 solution (Fig. 12b) and found to show almost the same spectra as those for the porous columnar samples formed in the NH 4 HF 2 /H 2 O 2 solutions [Fig.…”

“…8 However, a few studies were performed on chemical etching of Si wafers using Pd as the catalyst. [9][10][11][12][13][14] These studies reported a formation of the porous layers, which had morphologies the same as those popularly formed by anodic etching, stain etching, or photoetching (Ref. 15).…”

Patterned porous silicon photonic crystals with modular surface chemistry for spatial control of neural stem cell differentiation

“…Previous reports have used either n-type silicon with photomasks to define the etch regions 34 or through patterning the silicon wafer first using various masking techniques. 35,36 Alternative approaches using chemistry have been employed recently to pattern PSi. For instance, Gooding and colleagues recently developed a multistep approach to pattern chemically modified PSi using photolithography and demonstrated the applicability for cell microarrays with an optical read-out.…”