Performance analysis of two high actuator count MEMS deformable mirrors

Ryan, Peter; Cornelissen, Steven; Lam, Charlie; Bierden, Paul

doi:10.1117/12.2005299

Cited by 6 publications

(6 citation statements)

References 6 publications

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“…Top-left: Photo showing the electrode pattern for the Subaru telescope 188 element, 90 mm diameter bimorph deformable mirror [7]. Bottom-left: Boston Micromachines 32 × 32 actuator, 300 μm pitch MEMS deformable mirror [8]. Centre: Rear view of the Xinetics 349 actuator, 150 mm diameter deformable mirror used in the Keck AO systems [9].…”

Section: Wavefront Correctorsmentioning

confidence: 98%

“…The outer edge of the primary ranges from 9 to 11 m diameter; the equivalent collecting area is that of a 10 m circular aperture. 8 P. Wizinowich and the visible tip-tilt sensor (20). These sensors are co-aligned to use the same star, with the light split by a beamsplitter cube, and are moved around the 120 arc second diameter field by a x,y,z-stage.…”

Section: The Keck Ao Systemsmentioning

confidence: 99%

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Adaptive optics in astronomy

Wizinowich

2015

Contemporary Physics

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Section: Wavefront Correctorsmentioning

confidence: 98%

Section: The Keck Ao Systemsmentioning

confidence: 99%

Adaptive optics in astronomy

Wizinowich

2015

Contemporary Physics

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“…The broadly used digital micromirror devices (DMDs), for instance, which offer binary amplitude modulation, have been employed to target multiple depths via the generation of Fresnel zone plates, but the generation of foci at symmetric orders and efficiencies on the order of 1% make such tools impractical for axial focusing 36 . Deformable mirror arrays, on the other hand, are subject to inter-actuator coupling, which impedes radial phase wrapping, and utilize highly rigid suspension schemes that raise voltage drive requirements to hundreds of volts across hundreds of actuation channels, creating significant operating overhead 37,38 .…”

Section: Fig 1 Schematic Diagram Illustrating the Principle Of Operat...mentioning

confidence: 99%

A micromirror array with annular partitioning for high-speed random-access axial focusing

et al. 2020

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Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy, augmented/virtual reality (AR/VR), adaptive optics and material processing. However, the limitations of existing varifocal tools continue to beset the performance capabilities and operating overhead of the optical systems that mobilize such functionality. The varifocal tools that are the least burdensome to operate (e.g. liquid crystal, elastomeric or optofluidic lenses) suffer from low (≈100 Hz) refresh rates. Conversely, the fastest devices sacrifice either critical capabilities such as their dwelling capacity (e.g. acoustic gradient lenses or monolithic micromechanical mirrors) or low operating overhead (e.g. deformable mirrors). Here, we present a general-purpose random-access axial focusing device that bridges these previously conflicting features of high speed, dwelling capacity and lightweight drive by employing low-rigidity micromirrors that exploit the robustness of defocusing phase profiles. Geometrically, the device consists of an 8.2 mm diameter array of piston-motion and 48-μm-pitch micromirror pixels that provide 2π phase shifting for wavelengths shorter than 1100 nm with 10–90% settling in 64.8 μs (i.e., 15.44 kHz refresh rate). The pixels are electrically partitioned into 32 rings for a driving scheme that enables phase-wrapped operation with circular symmetry and requires <30 V per channel. Optical experiments demonstrated the array’s wide focusing range with a measured ability to target 29 distinct resolvable depth planes. Overall, the features of the proposed array offer the potential for compact, straightforward methods of tackling bottlenecked applications, including high-throughput single-cell targeting in neurobiology and the delivery of dense 3D visual information in AR/VR.

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“…Surface micromachining is an important micro-electro-mechanical systems (MEMS) technique that has been used in various fields such as optical-phased arrays (OPAs) [1], digital micromirror devices (DMD) [2,3], grating light valves (GLV) [4], etc. However, the conventional thin membrane deposition method used in surface micromachining, such as low-pressure chemical vapor deposition (LPCVD) [5] and magnetron sputtering [6], would lead to residual stress in deposited thin membranes, deteriorating the mechanical and optical performance of the devices accordingly [7]. First of all, the residual stress will change the elastic coefficient of fabricated thin membranes and affect the load-deflection curve, causing impaired influence to the mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

Study of Residual Stress Compensation in Continuous Membrane Micromirrors Based on Surface Micromachining Processes

Wang

Fang

et al. 2021

Coatings

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Residual stress is one of the key factors that directly determines the optical quality of micro-optical devices. With the same residual stress, the larger the aperture is, the worse the optical quality is. Therefore, continuous micromirrors are more affected by residual stress than segmented micromirrors. However, due to the complexity of boundary conditions, the influence of residual stress in segmented micromirror arrays on the device performance has been widely investigated in theory and practical applications, but only a few research results about the influence of residual stress in the continuous micromirror arrays have been reported. In this work, the residual stress both in continuous and segmented micromirror arrays is analyzed and summarized, then an accurate model for continuous micromirrors is developed. Compared with the existing models, it combines two additional factors, layer plate and point supported boundary conditions. Based on the proposed model, the change of critical stress of continuous micromirrors induced by different thicknesses of residual stress compensated membrane is theoretically investigated. Finally, the compensating experiment has been carried out, and the results show that the optical quality of micromirror can be remarkably improved, almost two orders of magnitude, with the introduction of residual stress compensation.

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Performance analysis of two high actuator count MEMS deformable mirrors

Cited by 6 publications

References 6 publications

Adaptive optics in astronomy

Adaptive optics in astronomy

A micromirror array with annular partitioning for high-speed random-access axial focusing

Study of Residual Stress Compensation in Continuous Membrane Micromirrors Based on Surface Micromachining Processes

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