2015
DOI: 10.1002/pssa.201431657
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Performance evaluation of channel length downscaling of various high voltage AlGaN/GaN power HEMTs

Abstract: Phone: þ1 518 258 786 Channel length downscaling characteristics of various lateral AlGaN/GaN high electron mobility transistors (HEMTs) are simulated. Quasi-constant-field scaled MOS channel HEMTs show superior performance over twodimensional electron gas (2DEG) channel HEMTs at deep submicron channel lengths. The adverse effects of deep submicron channel length on threshold voltage, drain-induced barrier lowering, subthreshold swing, transconductance and on-off current ratio are seen to be much less pronounc… Show more

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Cited by 11 publications
(5 citation statements)
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“…For all the devices, the internal channel current i ch is higher than the drain current i D during the turn-on period, and lower than i D during the turn-off period, confirming the validity of Eqs. (5) and (6). Comparing the two HEMT structures, the smaller gate voltage swing of p-AlGaN gate HEMT (À10 to 3 V) than that of MOS channel HEMT (À10 to 15 V) brings about its longer discharging time of C oss and hence longer In the turn-off waveforms of the MOS channel HEMT and the UMOSFET (Fig.…”
Section: Resultsmentioning
confidence: 98%
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“…For all the devices, the internal channel current i ch is higher than the drain current i D during the turn-on period, and lower than i D during the turn-off period, confirming the validity of Eqs. (5) and (6). Comparing the two HEMT structures, the smaller gate voltage swing of p-AlGaN gate HEMT (À10 to 3 V) than that of MOS channel HEMT (À10 to 15 V) brings about its longer discharging time of C oss and hence longer In the turn-off waveforms of the MOS channel HEMT and the UMOSFET (Fig.…”
Section: Resultsmentioning
confidence: 98%
“…Other methods to obtain enhancement mode HEMTs have also been developed; a p–n junction gate in the p‐AlGaN gate HEMT depletes the 2DEG channel at zero gate bias . The MOS channel HEMT combines the advantages of the HEMT and the MOSFET by combining the low‐resistivity 2DEG drift region of a traditional HEMT with a low gate‐leakage, enhancement‐mode MOS channel . The vertical GaN UMOSFET is also under investigation with potentially higher channel density and better robustness than the lateral HEMT .…”
Section: Introductionmentioning
confidence: 99%
“…29) 2DEG channels have smaller resistance than MOS channels due to their higher mobility. 30) CAVETs show the smallest R on,sp , since they benefit from both the vertical topology and the 2DEG channel. In contrast, MOS channel HEMTs employ the lateral topology as well as the MOS channel, resulting in the highest R on,sp .…”
Section: Discussionmentioning
confidence: 99%
“…For junction-side thermal management, approaches including the integration of high-k T heat spreading layers, flip-chip integration and microfluidic cooling could be utilized to dissipate heat from the active region. Junction-side thermal management is especially enticing for lateral (U)WBG transistor structures which typically have their active regions within tens of nanometers of the junction-side device surface, as is the case for structures such as GaN HEMTs, Al x Ga 1-x N HEMTs, and lateral Ga 2 O 3 MOSFETs [160][161][162][163].…”
Section: Device-package Co-designmentioning
confidence: 99%