Phase reactions in the Nb–N system below 1400°C

Lengauer, W.; Bohn, Marcel; Wollein, B.; Lisak, K

doi:10.1016/s1359-6454(00)00056-2

Cited by 57 publications

(28 citation statements)

References 10 publications

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“…Different phases in the Nb-N system (Fig. 1) may be listed as [8,10,11]: β-Nb 2 N (hexagonal), γ-Nb 4 N 3 (tetragonal), δ-NbN (cubic), δ′-NbN (hexagonal), ε-NbN (hexagonal), η-NbN (hexagonal) and α-Nb(N), a cubic solid solution formed by dissolving N 2 in Nb metal. In thin films, occurrences of these phases are related with the PVD deposition system's type, configuration and deposition parameters.…”

Section: Introductionmentioning

confidence: 99%

The effect of nitrogen pressure on cathodic arc deposited NbN thin films

Cansever

Danışman

Kazmanlı

2008

Surface and Coatings Technology

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Section: Introductionmentioning

confidence: 99%

The effect of nitrogen pressure on cathodic arc deposited NbN thin films

Cansever

Danışman

Kazmanlı

2008

Surface and Coatings Technology

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“…We put the accent on substoichiometric niobium nitride δ-NbN 0.875 (or B1-NbN 0.875 ) that was mixed with stoichiometric cubic aluminium nitride, B1-AlN. The motivation was the fact that stoichiometric cubic niobium nitride is dynamically unstable, for which reason it cannot be synthesized without nitrogen vacancies [56,57].…”

Section: Theoretical Detailsmentioning

confidence: 99%

Nanocomposite Nb-Al-N coatings: Experimental and theoretical principles of phase transformations

Pogrebnjak

Rogoz

Иващенко

et al. 2017

Journal of Alloys and Compounds

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Phase transformations of Al doped NbN nanocomposite coatings are studied in detail focusing on their microstructural evolution and phase composition. Several techniques such as XRD, SEM, HR-TEM, Nanoindentation and molecular dynamics simulation are employed in order to understand the phase evolution of the Nb-Al-N system. The nanocomposite structures were formed in the coatings, the roughness of the coatings decreased with increasing the Al concentration due to decreasing grain size. First-principles investigation of Nb-Al-N solid solutions was carried out to interpret film properties. It was found, that for small Al fractions, the solid solutions will form in agreement with our experimental results. The spinodal decomposition of Nb-Al-N solid solutions is supposed to be responsible for the formation of the nanocomosite structure observed in the deposited Nb-Al-N films.

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“…Relatively low deposition temperatures (substrate temperature during deposition $70 C) 50 implies that the deposition is not thermodynamically stable and suggests that the coatings contain a mixture of different phases. 58 Chemical composition was studied extensively for each of the binary combinations and is reported for Ti-N, [58][59][60] for Nb-N, 61,62 and for Cr-N. 63,64 C. Ex-situ nanoindentation…”

Section: B Chemical Composition Of Reference Coatingsmentioning

confidence: 99%

In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

et al. 2009

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Systematic studies of the deformation mechanisms of multilayer transition metal nitride coatings TiN/CrN, TiN/NbN, and NbN/CrN, and corresponding reference coatings of TiN, NbN, and CrN deposited by a direct current (dc) magnetron sputtering process onto silicon h100i have been performed. Mechanical characterization was conducted using a combination of microindentation and nanoindentation in the load range 30 to 150 mN and 0.5 to 3.5 mN, respectively. For both load ranges, scanning electron microscopy (SEM) in situ indentation was used to observe the indentation process including any pileup, sink-in, and fracture mechanisms specific to each coating. The coatings' microstructure, both before and after indentation, was analyzed using transmission electron microscopy (TEM). It was possible to both correlate the indentation load-displacement response to surface roughness effects and fracture modes (substrate and film cracking) and observe deformation mechanisms within the coatings.

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Phase reactions in the Nb–N system below 1400°C

Cited by 57 publications

References 10 publications

The effect of nitrogen pressure on cathodic arc deposited NbN thin films

The effect of nitrogen pressure on cathodic arc deposited NbN thin films

Nanocomposite Nb-Al-N coatings: Experimental and theoretical principles of phase transformations

In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

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