Photoresist parabolas for curved micromirrors

Rotich, S K; Smith, J. J.; Evans, A G R; Brunnschweiler, A.

doi:10.1088/0960-1317/8/2/016

Cited by 6 publications

(5 citation statements)

References 4 publications

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“…In this process, the final size of the individual grid elements was approximately 1 µm. Using this method represented a significant cost advantage over E-beam and other commercially produced masks that have been used by other workers in this field [4][5][6]. Additionally, high-resolution rapid prototyping masks were also produced using direct excimer laser abalation of the photographic emulsion on an exposed glass photo mask plate.…”

Section: Resultsmentioning

confidence: 99%

Fabrication of fluidic manifold systems using single-exposure grayscale masks

Hayden

Burt

2001

SPIE Proceedings

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Lab-on-a-chip devices are currently being developed at the University of Wales, Bangor. These devices can be used to manipulate and characterise bio-particles suspended in a fluid medium. For precise operation, accurate fluidic transport within these devices is required, for example at channel junctions where flow rates or mixing must be controlled. We present a technique for the production of varying cross-section channels and fluidic manifolds by photolithographic exposure of greyscale masks. This technique is ideally suited to the rapid prototyping and production of lab-on-a-chip devices, since a single exposure system is both faster and simpler than other methods currently available.

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Section: Resultsmentioning

confidence: 99%

Fabrication of fluidic manifold systems using single-exposure grayscale masks

Hayden

Burt

2001

SPIE Proceedings

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“…The amplitude modulation is produced by DLC thin films (Diamond Like Carbon) deposited over glass. A DOE is a component that works according to Huygens principle [3][4][5][6][7] and modifies wavefronts by segmenting and redirecting the segments through the use of interference and phase control.…”

Section: Introductionmentioning

confidence: 99%

Glass Difractive Optical Elements (DOEs) with complex modulation DLC thin film coated

Sparvoli

Mansano

2008

Mat. Res.

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We developed a complex (amplitude and phase) modulation Diffractive Optical Element (DOE) with four phase levels, which is based in a glass substrate coated with DLC (Diamond Like Carbon) thin film as the amplitude modulator. The DLC film was deposited by magnetron reactive sputtering with a graphite target and methane gas in an optical glass surface. The glass and DLC film roughness were measured using non destructive methods, such as a high step meter, Atomic Force Microscopy and Diffuse Reflectance. Other properties, such as refractive index of both materials were measured. The DOEs were tested using 632.8 nm HeNe laser.

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“…These DOEs will feature only two phase-controlling levels, which introduce either a 0 or 1/2 phase difference to the incident wave front. A DOE is a component that works according to Huygens principle [3][4][5][6][7]. This device modifies wave fronts segmenting and redirecting the segments through the use of interference and phase control.…”

Section: Introductionmentioning

confidence: 99%

Diffractive Optical Elements Based in Brand Glass

Sparvoli¹,

Mansano²,

Chubaci³

2008

ECS Trans.

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A Diffractive Optical Element (DOE) based in optical glass substrate was developed in this work. DOEs are lighter, occupy a relatively smaller volume and they can be fabricated using microelectronic processes. These devices had been built by glass etching: first, glass substrate was submitted to a cleanness process; after it was carried through a process of evaporation of an aluminum mask, which will be used to format the device. Before the etching process, a small layer of photo resist was deposited on aluminum, a lithographic process and wet process defines a pattern on the aluminum layer. Plasma etching was made by RIE (Reactive Ion Etching) equipment, remaining the diffractive patterns. The characterizations of these devices are performed by optical analyzes with a 633 nm HeNe laser. The roughness and etch rate of materials after etch process were obtained by Atomic Force Microscopy and high step meter.

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Photoresist parabolas for curved micromirrors

Cited by 6 publications

References 4 publications

Fabrication of fluidic manifold systems using single-exposure grayscale masks

Fabrication of fluidic manifold systems using single-exposure grayscale masks

Glass Difractive Optical Elements (DOEs) with complex modulation DLC thin film coated

Diffractive Optical Elements Based in Brand Glass

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