2003 IEEE Conference on Electron Devices and Solid-State Circuits (IEEE Cat. No.03TH8668)
DOI: 10.1109/edssc.2003.1283491
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Physical and electrical bandwidths of integrated photodiodes in standard CMOS technology

Abstract: The influence of different geometries (layouts) and structures of high-speed photodiodes in fully standard 0.18 pm CMOS technology on their intrinsic (physical) and eleetrienl bandwidth is analyzed. Three photodiode atrUCtures are studied: nwell/psubstrate. p+/nwell/paubstrate and p+/nwell. The photodiode bandwidths are compared for X=650 nm wavelength which is used in today's DVD OP tical pick-ups. Slow substrate current component limits the intrinsic bandwidth of nwell/psubstrate and p+/nwell/p substrate Dho… Show more

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Cited by 16 publications
(7 citation statements)
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“…Each of the junctions has its own specific frequency behavior and size dependency; these will be reviewed briefly in the next subsections. More detailed analyses can be found in, e.g., [17]- [19] and [20]. A short summary and a benchmark of the various photodiodes are given in Section II-A4.…”
Section: A Intrinsic Photodiode Bandwidthmentioning
confidence: 99%
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“…Each of the junctions has its own specific frequency behavior and size dependency; these will be reviewed briefly in the next subsections. More detailed analyses can be found in, e.g., [17]- [19] and [20]. A short summary and a benchmark of the various photodiodes are given in Section II-A4.…”
Section: A Intrinsic Photodiode Bandwidthmentioning
confidence: 99%
“…For the calculations, the photodiode surface is assumed to be reflective (i.e., the normal component of the gradient of the carrier density is zero) since the surface recombination process is slow compared to the frequencies of interest in this paper; the electron densities on the other three sides are assumed to be zero. It follows that the smallest dimension of the n-well (either the depth or the width) determines the bandwidth [12], [17]. For a 0.18-m CMOS process and nm, the 3-dB frequency is between 450 MHz (for wide n-wells) to over 900 MHz (for narrow n-wells).…”
Section: ) N-well/p-substrate Junctionmentioning
confidence: 99%
“…The photodiodes in standard CMOS silicon technologies suffer from slow substrate currents which degrade their temporal response, particularly for wavelengths above 600 nm [33].…”
Section: Intrinsic Photodetector Bandwidthmentioning
confidence: 99%
“…(1) in [5]. For the p+ region, the hole current response is calculated using the nwell response in previously analyzed diode and changing diffusion coefficient and diffusion length as well the depth of the junction (D p1 !…”
Section: P+/nwell/p-substrate Photodiodementioning
confidence: 99%