Piezoelectric films for 100-MHz ultrasonic transducers

Martin, Peter M.; Good, Morris S.; Johnston, John W.; Posakony, Gerald J.; Bond, Leonard J.; Crawford, Susan L.

doi:10.1016/s0040-6090(00)01339-0

Cited by 105 publications

(58 citation statements)

References 8 publications

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“…For a long time, attention in this area has focused on ZnO NWs due to their excellent material properties such as a wide band gap (3.37 eV) and large exciton binding energy (60 meV) at room temperature. In the initial stages, the predominant applications of ZnO were in optics, optoelectronic devices, sensors, photocatalysis, and actuators [8][9][10][11][12]. Its nanostructures have been reported in recent years.…”

Section: Introductionmentioning

confidence: 99%

Formation and optical properties of ZnO:ZnFe2O4 superlattice microwires

Dai

Zhou

et al. 2010

Nano Res.

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Pure ZnO hexagonal microwires and Fe(Ⅲ)-doped ZnO microwires (MWs) with a novel rectangular cross section were synthesized in a confined chamber by a convenient one-step thermal evaporation method. An oriented attachment mechanism is consistent with a vapor-solid growth process. Photoluminescence (PL) and Raman spectroscopy of the Fe(Ⅲ)-doped ZnO MWs and in situ spectral mappings indicate a quasi-periodic distribution of Fe(Ⅲ) along a one-dimensional (1-D) superlattice ZnO:ZnFe 2 O 4 wire, while PL mapping shows the presence of optical multicavities and related multimodes. The PL spectra at room temperature show weak near-edge doublets (376 nm and 383 nm) and a broad band (450-650 nm) composed of strong discrete lines, due to a 1-D photonic crystal structure. Such a 1-D coupled optical cavity material may find many applications in future photonic and spintronic devices.

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Section: Introductionmentioning

confidence: 99%

Formation and optical properties of ZnO:ZnFe2O4 superlattice microwires

Dai

Zhou

et al. 2010

Nano Res.

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“…These applications include the following: liquid crystal displays and window coatings, 1 optical waveguides, 2 gas sensors, 3 heat mirrors for energy saving, 4 solar cells, 5 optoelectronic devices, 6 lasers, 7 ultraviolet/violet light emitting diodes (LEDs), 8 surface acoustic wave devices (SAW), 9 microelectro mechanical systems (MEMS), 10 and ultrasonic transducers. 11 The ultimate purpose of this research project is to investigate the potential use of ZnO as the active piezoelectric film for thin film resonator (TFR) devices as band-pass filters in wireless communication systems. In particular, ZnO is a promising alternative to AlN due to its higher electromechanical coupling coefficient thus offering a broader bandwidth (k 33 is 10-20% higher for ZnO as compared to AlN 12,13 ).…”

Section: Introductionmentioning

confidence: 99%

Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering

Mirica

Kowach

Evans

et al. 2003

Crystal Growth & Design

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ABSTRACT:The morphological evolution of ZnO thin films deposited by magnetron sputtering has been investigated on two types of substrates, (111) textured Pt and (100) Si possessing a native oxide. The ZnO films are oriented with the c-axis [0001] normal to the substrate and possess varying degrees of crystallinity. The films have a columnar structure with column diameters in the range of 40-300 nm. As observed by field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), and X-ray diffraction, the film microstructure is strongly dependent on substrate temperature during deposition in the range from near room temperature up to 700°Cand is also dependent on substrate type. A textured film of platinum promotes nucleation thereby improving the crystallinity and texture of sputtered ZnO films. A mechanism for morphological evolution of the films via surface diffusion is proposed based on atom mobilities.

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“…A separate group of dual mode ultrasonic transducers compile artificially made CdS and ZnO films [5][6][7][8][9][10]. In thick CdS films with low disorientation the longitudinal mode L is easily excited.…”

Section: Tilted Cds and Zno Filmsmentioning

confidence: 99%

Simultaneous generation of longitudinal and shear ultrasonic waves: knowledge summary, PZT piezoelements manufacturing and experiments

Voleišis

Kažys

Voleišienė

et al. 2011

ultra

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Known ultrasonic transducers for simultaneous generation of longitudinal and shear waves are reviewed: quartz and lithium niobate crystals tilted CdS and ZnO films. A special attention is devoted to the rotated cuts of PZT piezoceramics, literature data theoretical background conclusions are analysed. Manufacturing technology of dual mode PZT transducers with different cut angles and thickness was developed. Reliable electrodes suitable for soldering are made chemically in electroless nickel (EN) plating bath. Nickel electrodes are additionally dectroplated with silver. Various types of PZT ceramics were successfully used. From impedance measurements longitudinal and shear resonances were determined for typical thicknesses 45-100 μm. The cut angle 36º for equal efficiency of both waves was experimentally determined. Operation of transducers soldered to the steel rods and measurement bodies of the certain geometry was investigated. Measurements were provided in a temperature range 20-160 ºC. Axial load experiments up to 234 MPa were provided and corresponding linear dependencies were determined. Experiments showed good performance of developed dual mode PZT ultrasonic transducers.

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Piezoelectric films for 100-MHz ultrasonic transducers

Cited by 105 publications

References 8 publications

Formation and optical properties of ZnO:ZnFe2O4 superlattice microwires

Formation and optical properties of ZnO:ZnFe2O4 superlattice microwires

Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering

Simultaneous generation of longitudinal and shear ultrasonic waves: knowledge summary, PZT piezoelements manufacturing and experiments

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