“…Facing the continuous increase in functional demands, many types of precision actuators such as magnetic actuators (Shutov et al, 2005;Yajima et al, 2000) and piezoelectric actuators (Cheng et al, 2015;Li et al, 2015;Peng et al, 2015Peng et al, , 2016Wang et al, 2015Wang et al, , 2016Yan et al, 2005) are being actively developed. Compared with magnetic actuators, piezoelectric actuators are more distinguished due to their attractive advantages such as mechanical simplicity, quick response, and electromagnetic immunity (Cheng et al, 2015;Li et al, 2015;Peng et al, 2015Peng et al, , 2016Shutov et al, 2005;Wang et al, 2015Wang et al, , 2016Yajima et al, 2000;Yan et al, 2005).…”