Piezoelectric Lead Zirconate Titanate (PZT) Ring Shaped Contour-Mode MEMS Resonators

Kasambe, P. V.; Asgaonkar, V. V.; Bangera, A. D.; Lokre, A. S.; Rathod, Surendra S.; Bhoir, Deepak

doi:10.1088/1757-899x/310/1/012069

Cited by 4 publications

(3 citation statements)

References 3 publications

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“…The optical properties of the material must be such that it absorbs significant amounts of the sunlight spectrum, and its electrical properties must be such that cells with high efficiency and high reliability can be produced to produce electrical energy. [13][14][15][16][17][18][19][20][21][22] One of the main problems of solar cells is not using all the energy and solar radiation. Because most of the designs use a phenomenon called photovoltaic in most structures, the proposed cell can only absorb photons whose energy is equal to the energy of the band gap.…”

Section: Introductionmentioning

confidence: 99%

Detailed analysis and numerical simulation of MEMS solar cell using closed form method

Esmaeili,

Ganji,

Vosta

2024

Preprint

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Solar cells are electronic devices that convert sunlight into electrical energy. Also, solar cells are known as a clean and renewable energy source. In this paper, for the first time, a new method with closed-form analytical equations is presented for the detailed analysis of a specific solar cell structure based on MEMS (micro-electromechanical system) technology. The proposed method is a comprehensive and complete analytical method, which is applicable and valid for all solar cell structures based on a two-layer cantilever with any piezoelectric. Also, using the proposed analytical method, closed relationships for calculating the open circuit voltage and other important parameters of this type of solar cells based on MEMS technology have been presented. With this proposed method, complex simulation tools will no longer be needed to calculate the open circuit voltage and other important parameters of solar cells with two-layer cantilevers. Also, the proposed closed-form relationships help designers to understand the design compromises and design the two-layer cantilever-based solar cell for their specific and desired conditions. To show the high validity of the proposed method, the simulation results have been compared with the theoretical results. In this comparison, the simulation results and the theoretical results are very close to each other or almost equal. Also, the proposed structure has been numerically simulated using Comsol software.

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Section: Introductionmentioning

confidence: 99%

Detailed analysis and numerical simulation of MEMS solar cell using closed form method

Esmaeili,

Ganji,

Vosta

2024

Preprint

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“…Albeit piezoelectric sensors, e.g. [5][6][7][8], are attractive for their low cost and simple detection method they are not accurate as their photonic counterparts. Many of the piezoelectric sensors with a high stiffness-to-mass ratio of their vibratory structure fit well for the generation and detection of high-frequency acoustic waves in the MHz range, and hence they are traditionally used in ultrasonography.…”

Section: Introductionmentioning

confidence: 99%

Adaptive opto-electromechanical silicon-on-insulator increased bandwidth accelerometer

Hussein

2022

SN Appl. Sci.

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This paper studies the construction of a compact one-dimension-sensing iscreased bandwidth photonic accelerometer using cascaded groups of continued sections of a 50 ng seismic mass each attached to the silicon beams of two under etched slot waveguide electrostatic phase shift elements acting as voltage-controlled adaptive-precision springs. The accelerometer sensitivity is shown to be significantly increased by applying equal electrode voltages. Simulation results indicate that the sensitivity dynamic range is about 76 dB combining both open-loop and closed-loop voltage control of the sensor. The operation bandwidth of the accelerometer may be increased up to 250 kHz due to the cascaded multi-section architecture of the sensor. This advantage gives significant relief to the limitation in bandwidth response of single section counterparts. The sensor may be designed to detect impact accelerations up to 104 ms−2 and yet can still be electrostatically driven to detect sub-gravitational accelerations. The application of negative feedback voltage control to hold the seismic mass at close distances from a standstill is shown to significantly increase the acceleration detection range. The construction uses all in-plane components based on a silicon-on-insulator template with 300 nm of silicon core thickness. The proposed electromechanical suspension system and the electric feeding arrangements are the most simple. The accelerometer performance is theoretically deterministic. The study is based on performing numerical analysis for the electromechanical suspension system. The waveguides are simulated utilizing the VPIphotonics industry standard. Applications may include the automobile and aerospace industries, underwater sonar, industrial ultrasonic detection, seismology predictions, and medical ultrasonography. Article Highlights The cascading of compact high-speed accelerometer sections allows increasing the bandwidth response of the proposed sensor by many folds compared to its single-mass single-section counterparts. The suspension structure is electrostatically controlled by two voltages enabling widely controlling the sensitivity and detection range of the accelerometer. The proposed accelerometer may fit wide applications achieving high detection speeds and super sensitivities utilizing a small footprint and power-efficient structure.

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“…Several researchers [8,9,10,11,12,13,14,15,16] have demonstrated the ring resonators or (disc resonator with hole is developed in center). It is noted that operating frequency, and design of resonator play an important role in the performance and improving the quality factor of resonators.…”

Section: Introductionmentioning

confidence: 99%

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Khan

Bao

et al. 2019

Micromachines

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This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.

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Piezoelectric Lead Zirconate Titanate (PZT) Ring Shaped Contour-Mode MEMS Resonators

Cited by 4 publications

References 3 publications

Detailed analysis and numerical simulation of MEMS solar cell using closed form method

Detailed analysis and numerical simulation of MEMS solar cell using closed form method

Adaptive opto-electromechanical silicon-on-insulator increased bandwidth accelerometer

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

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