Piezoelectric Mems Microphones Noise Sources

Littrell, Robert; Gagnon, R.

doi:10.31438/trf.hh2016.69

Cited by 12 publications

(16 citation statements)

References 7 publications

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“…Piezoelectric acoustic sensors utilizing these structures have been widely documented. [9][10][11][12][13][14] In diaphragm-based designs, the sensitivity is greatly influenced by residual stress, necessitating meticulous stress management. Conversely, with one end free, cantilever-based sensors exhibit larger displacements under sound pressure, enhancing their sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Kuchiji,

Masumoto,

Morishita

et al. 2024

Jpn. J. Appl. Phys.

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A wideband acoustic sensor is reported, comprising a piezoelectric micro electro mechanical systems (MEMS) acoustic transducer with organic film-coated cantilevers. Considering the sensitivity reduction associated with the application of an organic film, it is necessary to optimize the material selection and thickness of the organic film. Therefore, the relationship between the thickness of the polyurethane film and the consequent loss in sensitivity is elucidated. Our findings demonstrate that the polyurethane film thickness should be approximately 0.5 μm (or less) to limit sensitivity loss to 6 dB. Additionally, both simulations and experimental results reveal that the resonant frequency of the system is significantly influenced by the warpage of the cantilever. This study provides essential insights into optimizing the performance of MEMS acoustic transducers with organic film-coated cantilevers.

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Section: Introductionmentioning

confidence: 99%

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Kuchiji,

Masumoto,

Morishita

et al. 2024

Jpn. J. Appl. Phys.

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“…Recently, the widespread use of the Internet of Thing technology has increased the demand for acoustic sensors, and higher signalto-noise ratio and wider bandwidths are expected. [1][2][3][4] An infrasound sensor is necessary because human body sounds contain infrasounds below 20 Hz. [5][6][7] However, the operating sounds of machines and sounds generated by fluids contain ultrasonic waves with frequencies of 20 kHz or higher, and ultrasonic sensors are effective in monitoring the condition of facilities.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric MEMS wideband acoustic sensor coated by organic film

Kuchiji¹,

Masumoto²,

Baba³

2023

Jpn. J. Appl. Phys.

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In this study, we developed an acoustic sensor with a structure in which a piezoelectric cantilever array is covered with an organic film. For this, we used AlN and polyurethane as the piezoelectric material and organic film, respectively. The results suggested that the sensitivity in the low-frequency region improved, and the resonance frequency increased. We investigated the resonance frequency based on a simulation and verified that it matched the measured value. Further, we created a broadband acoustic sensor by covering the space between the cantilevers with an organic film.

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“…Multiple applications seek microphones with higher Signal-to-Noise Ratio (SNR) performance to improve or add features. One application is smart assistants, such as Amazons Alexa and Apples Siri [3], where a limitation to the user experience is how well the voice command is picked up. Distinguishing speech from noise is easier if the SNR of the microphone is high.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Charge Pump Topologies for High Voltage Mobile Microphone Applications

Toft

Jørgensen

2021

ELEKTRON ELEKTROTECH

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This paper presents a novel analysis of charge pump topologies for very high voltage capacitive drive micro electro-mechanical system microphones. For the application, the size and power consumption are sought to be minimized, and a voltage gain of 36 is achieved from a 5 V supply. The analysis compares known charge pump topologies, taking into consideration on resistance of transistors and parasitic capacitances of transistors and capacitors in a 180 nm silicon-on-insulator process. The analysis finds that the Pelliconi charge pump topology is optimal for generating very high bias voltages for micro electro-mechanical system microphones from a low supply voltage when the power consumption and area are limited by the application.

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Piezoelectric Mems Microphones Noise Sources

Cited by 12 publications

References 7 publications

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Dependence of sensitivity loss on organic film thickness and influence of cantilever warpage in a piezoelectric wideband acoustic sensor coated with an organic film

Piezoelectric MEMS wideband acoustic sensor coated by organic film

Analysis of Charge Pump Topologies for High Voltage Mobile Microphone Applications

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