Piezoelectric micro dither stage calibration of 6-axis IMU

Pinrod, Visarute; Nadig, Sachin; Ardanuç, Serhan; Lal, Amit

doi:10.1109/memsys.2016.7421799

Cited by 14 publications

(3 citation statements)

References 12 publications

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“…The self-aligned feature of this actuator can be attractive for quadrature-error free gyroscopes 23 , tangential-mode TED-free oscillators. It is also important that obtained rotation rate values of the tangential mode and its linear dependency on the amplitude of the applied signal indicates that the tangential mode itself can serve as a micro rate table for in-site scale-factor calibration of gyroscopes [24][25][26] . Therefore, this technology provides the key building block for a BAW MEMS gyroscope with a built-in primary calibration stage.…”

Section: Discussionmentioning

confidence: 99%

Self-Aligned Single-Electrode Actuation of Tangential and Wineglass Modes using PMN-PT

Erturk¹,

Park²,

Lee³

et al. 2022

Preprint

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Considering evolution of rotation sensing and timing applications realized in Micro-electromechanical systems (MEMS), flexural mode resonant shapes are outperformed by bulk acoustic wave (BAW) counterparts by achieving higher frequencies with both electrostatic and piezoelectric transduction. Within the 1-30 MHz range, which hosts BAW gyroscopes and timing references, piezoelectric and electrostatic MEMS have similar transduction efficiency.Although, when designed intelligently, electrostatic transduction allows self-alignment between electrodes and the resonator for various BAW modes, misalignment is inevitable regarding piezoelectric transduction of BAW modes that require electrode patterning. In this paper transverse piezoelectric actuation of [011] oriented single crystal lead magnesium niobate-lead titanate (PMN-PT) thin film disks is shown to excite the tangential mode and family of elliptical compound resonant modes, utilizing a self-aligned and unpatterned electrode that spans the entire disk surface. The resonant mode coupling is achieved employing a unique property of [011] PMN-PT, where the in-plane piezoelectric coefficients have opposite sign. Fabricating 1-port disk transducers, RF reflection measurements are performed that demonstrate the compound mode family shapes in 1-30 MHz range. Independent verification of mode transduction is achieved using in-plane displacement measurements with Polytec's Laser Doppler Vibrometer (LDV). While tangential mode achieves 40 o /sec dithering rate at 335 kHz resonant frequency, the n=2 wine-glass mode achieves 11.46 nm tip displacement at

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Section: Discussionmentioning

confidence: 99%

Self-Aligned Single-Electrode Actuation of Tangential and Wineglass Modes using PMN-PT

Erturk¹,

Park²,

Lee³

et al. 2022

Preprint

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“…However, in some special application scenarios, e.g., space and underwater, this recalibration may be impracticable. In previous studies, a micro-vibration platform based on piezoelectric materials has been developed to realize calibration in the field for inertial sensors [ 23 , 24 , 25 ]. Based on the micro-vibration platform, Li proposed a system that integrates an optical detection sensor for the calibration of accelerometers [ 26 ].…”

Section: Introductionmentioning

confidence: 99%

A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

Zhai

Xiong

et al. 2023

Micromachines

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This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. This method uses a series of voltage signals to simulate the inertial forces caused by the acceleration input, rather than frequent and laborious calibrations with high-precision instruments. The error transfer model of this method is systematically analyzed, and the geometrical parameters of this novel micromachined resonant accelerometer (MRA) are optimized. The experimental results demonstrate that, referring to the traditional earth’s gravitational field tumble calibration method, the error of the scale factor calibration is 0.46% within ±1 g by using our method. Moreover, the scale factor is compensated by virtual accelerations. After compensation, the maximum temperature drift of the scale factor decreases from 2.46 Hz/g to 1.02 Hz/g, with a temperature range from 40 °C to 80 °C.

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“…However, the complexity of design and process limits the universality in such method. The other is to take externally integrated micro structures to provide physical excitation for self-calibration [12][13][14][15]. The micro vibration platform which can provide multi-DOF motion has the inherent advantage in the self-calibration for MEMS-IMUs to compensate the longterm stability problem caused by the drift of the scale factor [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Integrated piezoelectric micromechanical vibration platform for six degree of freedom motion

Qin

Gong

Chen

et al. 2019

J. Micromech. Microeng.

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Piezoelectric micromechanical actuators are featured with a low driving voltage, fast response and large-range output, which make them desirable for applications of long-term drift error self-calibration in microelectromechanical systems (MEMS) inertial measurement units. A micromechanical vibration platform supported by four folded beams and excited by 32 partitioned electrodes based on PZT film is presented in this paper. PZT-silicon on insulator based wafer-level MEMS process and packaging technique are conducted in the manufacture and integration for the micro vibration platform. The six-degree-of-freedom (6 DOF) motion of the micro vibration platform is experimentally verified. In addition, the motion behavior control, damping characteristics and fatigue characteristics are analyzed. The 6 DOF micro vibration platform has a stable capability of large-range dynamic output.

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Piezoelectric micro dither stage calibration of 6-axis IMU

Cited by 14 publications

References 12 publications

Self-Aligned Single-Electrode Actuation of Tangential and Wineglass Modes using PMN-PT

Self-Aligned Single-Electrode Actuation of Tangential and Wineglass Modes using PMN-PT

A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

Integrated piezoelectric micromechanical vibration platform for six degree of freedom motion

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