Piezoelectric micromotors for microrobots

Flynn, Anita M.; Tavrow, Lee S.; Bart, Stephen F.; Brooks, Rodney A.; Ehrlich, D. J.; Udayakumar, K. R.

doi:10.1109/84.128055

Cited by 207 publications

(59 citation statements)

References 13 publications

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“…The possibility of miniaturization and integration with silicon technology makes piezoelectric thin films interesting for various microactuator devices [1,2,3]. In recent years, there was a significant advance in the design and the processing of such devices, which has not been followed, however, by a similar progress in the understanding of the mechanisms which control and affect their piezoelectric response.…”

Section: Introductionmentioning

confidence: 99%

Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

et al. 1994

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The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating electric field reveals that extrinsic contributions to the dielectric permittivity become active at large fields. The DC electric field has the effect of freezing out the extrinsic contributions. The influence of the dielectric loss on the piezoelectric properties is discussed.

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Section: Introductionmentioning

confidence: 99%

Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

et al. 1994

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“…Electrostatic [44], thermal [45,46], shape memory alloys [47], and piezoelectric microactuators [48] cannot operate in physiological media. Their operation is typically accompanied by electrolysis, high temperatures, restricted actuation control and poor repeatability, making these types of actuators unsuitable.…”

Section: Polymer Microrobticsmentioning

confidence: 99%

Single Molecular Detection via Micro-Scale Polymeric Opto-Electro-Mechanical Systems

Lee¹,

Pisano²,

Pruitt³

et al. 2005

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“…This type of motor is considered to be superior to other types of micromotors for down scaling: magnetic forces show a less favorable scaling down behavior; and the electrostatic forces do not achieve the high energy densities realized in piezoelectric materials [1]. Such micromotors will allow further miniaturization accompanied by an increase in the functionality of micro robots, autofocusing lens systems, watches and precision positioning devices.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterization of PZT thin-film vibrators for micromotors

Muralt

Köhli

Maeder

et al. 1995

Sensors and Actuators A: Physical

185

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For the first time we have characterized a micromotor driven by a piezoelectric PZT (PbZr x Ti 1-x O 3 ) thin film. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a diameter of 4 mm. The amplitudes of the membrane deflections have been measured by means of laser interferometry. They are as large as 800 nm/V at the first resonance (26 kHz), and 60 nm/V at 1 Hz. This is one order of magnitude larger than previously reported for a ZnO activated device of similar geometry. The operation of the motor was obtained at 1 to 3 V rms , with speeds of up to 200 rpm at 1.1 V rms and torques of 35 nN·m at 2.5 V rms and 1 mN force between rotor and stator. In comparison with the conceptually identical ZnO version published by Racine et al. this is an improvement by a factor of 3 in speed per volt. Taking into account the linear increase of the torque with the stator vibration frequency, the torque per voltage is a factor two higher. A long time test of 100 h showed no degradation of the motor performance.

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Piezoelectric micromotors for microrobots

Cited by 207 publications

References 13 publications

Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

Single Molecular Detection via Micro-Scale Polymeric Opto-Electro-Mechanical Systems

Fabrication and characterization of PZT thin-film vibrators for micromotors

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