2003
DOI: 10.1063/1.1558228
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Piezoelectric response of thin films determined by charge integration technique: Substrate bending effects

Abstract: Unexpectedly high-longitudinal piezoelectric coefficients have recently been reported in c-axis oriented Pb(Zr,Ti)O3 thin films with morphotropic phase boundary composition [Fu et al., Appl. Phys. Lett. 80, 3572 (2002)]. Our analysis and experimental results show that, in comparison with other methods commonly used to investigate piezoelectric response of thin films, the charge integration technique used by Fu et al. may lead to an order of magnitude higher apparent piezoelectric coefficients if the substrate … Show more

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Cited by 67 publications
(32 citation statements)
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“…However the Kirchhoff plate conditions and our assumption on the shear stress in 1-2 plane implies we only need to consider S j for j=1... 3 …”
Section: Solving the Force Balance Equationmentioning
confidence: 99%
See 3 more Smart Citations
“…However the Kirchhoff plate conditions and our assumption on the shear stress in 1-2 plane implies we only need to consider S j for j=1... 3 …”
Section: Solving the Force Balance Equationmentioning
confidence: 99%
“…is dependent on the thickness ratio between PY and NP materials ͑R͒, it would make sense to have R as the independent variable. In order to derive the efficiency comparison expression, let t 3 be the total thickness of all the constituents added together; t 3 One can now make a comparison between a PY material by itself and its 2-2 connectivity composite. The simplest way to do this is by ratio.…”
Section: A Thermal Mass and Efficiencymentioning
confidence: 99%
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“…Therefore, it may be possible to miniaturize PVDF-tactile sensors by replacing PVDF with VDF oligomer. Thus far, various techniques to measure piezoelectric coefficients have been proposed (1), (28), (29) , but the measurement results depend on the experimental apparatus. These methods can be categorized by whether the direct piezoelectric effect, i.e., applying a stress and measuring the induced charge, or the converse piezoelectric effect, i.e., applying a voltage and measuring the induced elongation, is used (28) .…”
Section: Introductionmentioning
confidence: 99%