Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2022 2022
DOI: 10.1117/12.2630955
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Piezoelectric strain sensor through reverse replication based on two-photon polymerization

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Cited by 6 publications
(4 citation statements)
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“…The conventional methods for fabrication of microstructures in the sensing layer, such as photo structuring, etching, and molding [14][15][16] , are a monotonous multi-step process that lacks resolution and requires immense processing time. Additive manufacturing (AM) technology has advanced to the point where micro-and nano-scale structures fabrication is feasible with minimized material utilization and reduced mass production costs 17,18 .…”
Section: Introductionmentioning
confidence: 99%
“…The conventional methods for fabrication of microstructures in the sensing layer, such as photo structuring, etching, and molding [14][15][16] , are a monotonous multi-step process that lacks resolution and requires immense processing time. Additive manufacturing (AM) technology has advanced to the point where micro-and nano-scale structures fabrication is feasible with minimized material utilization and reduced mass production costs 17,18 .…”
Section: Introductionmentioning
confidence: 99%
“…The numerical analysis includes scattering parameter and voltage response in frequency and time domains. Compared to the surface deposited IDTs, embedding the electrode demonstrates an enhancement in sensitivity due to higher piezoelectric coupling [12][13][14] , which also protects the IDT structure from the external environment. The sensitivity of each IDT layout towards mechanical strains is quantified using an initial strain model with varying mechanical strain concentrations.…”
Section: Introductionmentioning
confidence: 99%
“…While a great progress was accomplished in micropatterning for electrical systems for last several decades, some challenges intrinsic to novel MEMS are yet to be addressed. 1,2,3 . Firstly, the dynamically growing field of MEMS and small robotics can benefit from a manufacturing method of producing electrodes and conductive traces that can be effectively adapted to various designs 4 .…”
Section: Introductionmentioning
confidence: 99%