Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

Abramenko, D. B.; Antsiferov, P. S.; Astakhov, Dmitry; Vinokhodov, Aleksandr Yur’evich; Vichev, Ilia Yurievich; Gayazov, R. R.; Grushin, Aleksandr Sergeevich; Dorokhin, L. A.; Ivanov, V. V.; Kim, Dmitrii Andreevich; Koshelev, K. N.; Krainov, P. V.; Krivokorytov, M. S.; Krivtsun, V. M.; Lakatosh, B. V.; Lash, A. A.; Medvedev, V. V.; Ryabtsev, A. N.; Sidelnikov, Yu. V.; Snegirev, E. P.; Solomyannaya, Anna Dmitrievna; Spiridonov, Maxim; Tsygvintsev, Il’ya Pavlovich; Yakushev, O. F.; Yakushkin, A. A.

doi:10.3367/ufnr.2018.06.038447

Cited by 12 publications

(5 citation statements)

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“…Currently, a radiation source at a wavelength of 13.5 nm [15] is being developed on the basis of the tin emission line. The task of maximum collection of such radiation is urgent.…”

Section: Stock Mirrors Mo/be and Mo/si With Spectral Bandwidth Coinci...mentioning

confidence: 99%

Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering

et al. 2022

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The article considers broadband multilayer X-ray mirrors based on Mo/Be and Mo/Si structures with a transmission band coinciding with the Si Lα (13.5 nm) and Sn (13.5 nm) emission lines. The described structures are of great interest for the currently developed liquid source of EUV radiation, since they make it possible to increase the efficiency of the source-X-ray optical system due to the "complete" capture of emission lines. Keywords: extreme ultraviolet radiation, emission spectrum, laser spark, multilayer X-ray mirror.

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“…Currently, a radiation source at a wavelength of 13.5 nm [15] is being developed on the basis of the tin emission line. The task of maximum collection of such radiation is urgent.…”

Section: Stock Mirrors Mo/be and Mo/si With Spectral Bandwidth Coinci...mentioning

confidence: 99%

Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering

et al. 2022

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“…Для успешного развития данных приложений существует потребность в высокоинтенсивных лабораторных источниках мягкого рентгеновского излучения. В настоящее время наиболее удобными по совокупности свойств являются лазерно-плазменные источники излучения (ЛПИ) [4].…”

Section: Introductionunclassified

Исследование эмиссионных свойств газоструйных мишеней в водном окне прозрачности" 2.3-4.4 nm при импульсном лазерном возбуждении

Гусева¹,

Нечай²,

Перекалов³

et al. 2022

Журнал Технической Физики

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The article considers the results of studying the emission radiation of Ar, Kr, CO2, CHF3, CF4 and N2 gas jets excited by pulsed laser radiation. The shape of the spectral dependence in the spectral range 2.3–4.4 nm and the emission intensity of a number of lines in absolute units were studied. To excite the targets, a Nd:YAG laser, λ=1064 nm, τ=5.2 ns, Eimp=0.8 J was used. A supersonic conical nozzle with dcr = 450 μm, 2α = 11о, L= 5 mm was used to form a pulsed gas jet. The pressure at the nozzle inlet was 25 bar, which corresponds to the developed condensation of molecular gases in gas jets. The spectra were deciphered and the ions emitting under the given experimental conditions were determined.

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“…For the successful development of these applications, there is a need for high-intensity laboratory sources of soft X-ray radiation. Currently, the most convenient in terms of the set of properties are laser-plasma radiation sources (LPRS) [4].…”

Section: Introductionmentioning

confidence: 99%

Investigation of the emission properties of gas-jet targets in the water transparency window" of 2.3-4.4 nm under pulsed laser excitation

Nechay

Perekalov

et al. 2022

Technical Physics

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The article considers the results of studying the emission radiation of Ar, Kr, CO2, CHF3, CF4 and N2 gas jets excited by pulsed laser radiation. The shape of the spectral dependence in the spectral range 2.3-4.4 nm and the emission intensity of a number of lines in absolute units were studied. To excite the targets, a Nd : YAG laser, λ=1064 nm, tau=5.2 ns, Eimp=0.8 J was used. A supersonic conical nozzle with dcr=450 μm, 2α=11o, L=5 mm was used to form a pulsed gas jet. The pressure at the nozzle inlet was 25 bar, which corresponds to the developed condensation of molecular gases in gas jets. The spectra were deciphered and the ions emitting under the given experimental conditions were determined. Keywords: gas jets, shock waves, extreme ultraviolet radiation, emission spectra, laser plasma, X-ray spectrometer monochromator.

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Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

Cited by 12 publications

References 0 publications

Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering

Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering

Исследование эмиссионных свойств газоструйных мишеней в водном окне прозрачности" 2.3-4.4 nm при импульсном лазерном возбуждении

Investigation of the emission properties of gas-jet targets in the water transparency window" of 2.3-4.4 nm under pulsed laser excitation

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Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

Cited by 12 publications

References 0 publications

Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering

Research and creation of broadband X-ray mirrors with a spectral transmission band coinciding with emission lines and the possibility of filtering

Исследование эмиссионных свойств газоструйных мишеней в водном окне прозрачности" 2.3-4.4 nm при импульсном лазерном возбуждении

Investigation of the emission properties of gas-jet targets in the water transparency window&quot; of 2.3-4.4 nm under pulsed laser excitation

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Investigation of the emission properties of gas-jet targets in the water transparency window" of 2.3-4.4 nm under pulsed laser excitation