Plasma copolymerization of CFC-113 with C2H2, C2H4 and C2H6 monomers.

Abstract

CFC-113 is known to be difficult to polymerize as a single monomer when treated under conventional plasma polymerization conditions. However, we found that by mixing it with substances with similar chemical structures, such as acethylene (C2H), 2ethylene (C2H4) or ethane (C2H6), there are polymerized at a higher deposition rate. We observed one significant aspect of this reaction is that the copolymerization of CzH2 can reach deposition rates up to 9000 A/mm, nwe also observed the higher deposition rates of CFC-113 and hydrocarbons polymerized as a function of number of hydrogen molecules such as CzH2>C2Ha>C2H6. A reaction pathway is proposed in which fluorine atoms derived from CFC-113 react rapidly with hydrocarbon producing free radical intermediates which can subsquently polymerize.

Surface Chemical Analysis of Plasma‐Deposited Copolymer Films Prepared from Feed Gas Mixtures of Ethylene or Styrene with Allyl Alcohol

“…Similar synergistic, i.e. productive, effects were found for plasma copolymerization of CFC‐13 with acetylene, ethylene or ethane 19…”

“…It should also be mentioned that a plasma copolymerization of a classically not polymerizable compound actually may “copolymerize” in a mixture with hydrocarbon monomers as for instance acetylene 24. Similarly, it has been shown, that CFC‐113, which is known to be difficult to polymerize by a plasma process, can be copolymerized with high deposition rates when it is mixed with acetylene, ethylene or ethane 19…”

Surface Property of Plasma Deposited Copolymer Films Using Chlorofluorocarbon with Ethylene Monomer

“…Several analytical data were previously reported. [2][3][4][5] The plasma copolymer films provide good resistance against acid and aggressive organic solvents, and chemically inert. Other interesting properties include, highly hydrophobic surfaces and good adhesion.…”