2017
DOI: 10.1364/josaa.34.001974
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Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film

Abstract: We extend the theory of Kassam et al. [J. Opt. Soc. Am. A 12, 2009 (1995)] for scattering by oblique columnar structure thin films to include the induced form birefringence and the propagation of radiation in those films. We generalize the 4 × 4 matrix theory of Berreman [J. Opt. Soc. Am. 62, 502 (1972)] to include arbitrary sources in the layer, which are necessary to determine the Green function for the inhomogeneous wave equation. We further extend first-order vector perturbation theory for scattering by ro… Show more

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Cited by 6 publications
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“…The polarization of the scattered beam can frequently indicate the source of that scattered light. Using Light Scattering Ellipsometry, by which the polarization of the beam scattered into directions out of the plane of incidence, is measured for a fixed incident polarization, subsurface defects, scattering from microroughness, and particular clog also can be distinguished [64].…”
Section: How the Optical Properties Of Ncps Affect The Characteristic...mentioning
confidence: 99%
“…The polarization of the scattered beam can frequently indicate the source of that scattered light. Using Light Scattering Ellipsometry, by which the polarization of the beam scattered into directions out of the plane of incidence, is measured for a fixed incident polarization, subsurface defects, scattering from microroughness, and particular clog also can be distinguished [64].…”
Section: How the Optical Properties Of Ncps Affect The Characteristic...mentioning
confidence: 99%