Polycrystalline diamond pressure sensor

Wur, D.R.; Davidson, J.L.; Kang, W.P.; Kinser, D. L.

doi:10.1109/84.365368

Cited by 42 publications

(13 citation statements)

References 27 publications

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“…A similar layout with a diamond diaphragm was reported by Chalker and Johnston [69]. Wur et al [130] pointed out that there are two advantages in using polycrystalline diamond as a diaphragm material. First, diamond is chemically inert and can serve as an etch-stop with a large etching time tolerance.…”

Section: Diamond Pressure Sensorsmentioning

confidence: 86%

High—temperature Sensors Based on SiC and Diamond Technology

et al. 1999

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Section: Diamond Pressure Sensorsmentioning

confidence: 86%

High—temperature Sensors Based on SiC and Diamond Technology

et al. 1999

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“…The MEMS field provided incentives for the conceptualization and sustained development of such processes as deep reactive ion etching, photodefinable SU-8 epoxy, [18] and self-assembly. [19] Over the years, the MEMS field has steadily expanded its material base to include compound semiconductors, [20,21] diamond, [22][23][24] and ceramics. [25,26] Polymer is a large class of material that includes three major categories: fibers, plastics, and elastomers.…”

Section: Introductionmentioning

confidence: 99%

Recent Developments in Polymer MEMS

2007

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Polymer materials, including elastomers, plastics and fibers, are being actively used for MEMS sensors and actuators. Polymer materials provide many advantages in terms of cost, mechanical properties, and ease of processing. In addition, polymers are being investigated for displays, memory, and circuitry. However, the incorporation of polymers for structural or functional purposes in MEMS systems raises new issues and challenges. This article provides a comprehensive review of the recent state of the art of polymer based MEMS—including materials, fabrication processes, and representative devices, including microfluidic valves and tactile sensors. Frequently used materials are reviewed, including polydimethylsiloxane (PDMS), parylene, nanocomposite elastomers, and SU‐8 epoxy.

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“…Pressure sensors made of all diamond (i.e. both membranes and piezoresistors are made of diamond) have also been fabricated and characterized (Wur et al 1995;Davidson et al 1996).…”

Section: Case 2: Maximizing Diaphragm Resonance Frequency (Minimizingmentioning

confidence: 99%

Material selection for optimum design of MEMS pressure sensors

2019

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Choice of the most suitable material out of the universe of engineering materials available to the designers is a complex task. It often requires a compromise, involving conflicts between different design objectives. Materials selection for optimum design of a Micro-Electro-Mechanical-Systems (MEMS) pressure sensor is one such case. For optimum performance, simultaneous maximization of deflection of a MEMS pressure sensor diaphragm and maximization of its resonance frequency are two key but totally conflicting requirements. Another limitation in material selection of MEMS/ Microsystems is the lack of availability of data containing accurate micro-scale properties of MEMS materials. This paper therefore, presents a material selection case study addressing these two challenges in optimum design of MEMS pressure sensors, individually as well as simultaneously, using Ashby's method. First, data pertaining to micro-scale properties of MEMS materials has been consolidated and then the Performance and Material Indices that address the MEMS pressure sensor's conflicting design requirements are formulated. Subsequently, by using the micro-scale materials properties data, candidate materials for optimum performance of MEMS pressure sensors have been determined. Manufacturability of pressure sensor diaphragm using the candidate materials, pointed out by this study, has been discussed with reference to the reported devices. Supported by the previous literature, our analysis re-emphasizes that silicon with 110 crystal orientation [Si (110)], which has been extensively used in a number of micro-scale devices and applications, is also a promising material for MEMS pressure sensor diaphragm. This paper hence identifies an unexplored opportunity to use Si (110) diaphragm to improve the performance of diaphragm based MEMS pressure sensors.

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Polycrystalline diamond pressure sensor

Cited by 42 publications

References 27 publications

High—temperature Sensors Based on SiC and Diamond Technology

High—temperature Sensors Based on SiC and Diamond Technology

Recent Developments in Polymer MEMS

Material selection for optimum design of MEMS pressure sensors

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