2016
DOI: 10.1149/2.0121702jes
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Polymer-Assisted Solution Processing of TiO2Thin Films for Resistive-Switching Random Access Memory

Abstract: In this study, we present a polymer-assisted solution (PAS) process to prepare TiO 2 electrolyte layers for resistive-switching random access memory (ReRAM). The PAS process utilizes the stability of metal-polymer complexes in the coating solution to form uniform and dense films. In addition, the viscosity of the PAS coating solution can easily be adapted for any currently used coating technique. The electrochemical-metallization-based (ECM-based) ReRAM devices were prepared by spin-coating the PAS coating sol… Show more

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Cited by 9 publications
(6 citation statements)
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“…[9][10][11][12][13][14][15][16][17][18][19] Among which, polymeric material has attracted more attentions due to its typical advantages as solution processability, structural tunability, three-dimension stacking, largescale flexibility, etc. [20][21][22][23][24][25] In the early research of polymeric ReRAM, the materials as poly(N-vinylcarbazole) (PVK), [26][27][28] polystyrene (PS), [29][30][31] polymethylmethacrylate (PMMA), [32][33][34][35] poly(vinylidene chloride) (PVC), [30] and polyvinylfluoride (PVF) [36] were frequently chosen as active-layers to fabricate aluminum/polymer/aluminum (Al/polymer/Al) structured devices, and filament formation mechanism was proposed to interpret the switching behaviors. [37][38][39] However, the formation of metal filament is not the intrinsic characteristics of these polymers, which in turn is resulting from the physical damages of the devices.…”
Section: Introductionmentioning
confidence: 99%
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“…[9][10][11][12][13][14][15][16][17][18][19] Among which, polymeric material has attracted more attentions due to its typical advantages as solution processability, structural tunability, three-dimension stacking, largescale flexibility, etc. [20][21][22][23][24][25] In the early research of polymeric ReRAM, the materials as poly(N-vinylcarbazole) (PVK), [26][27][28] polystyrene (PS), [29][30][31] polymethylmethacrylate (PMMA), [32][33][34][35] poly(vinylidene chloride) (PVC), [30] and polyvinylfluoride (PVF) [36] were frequently chosen as active-layers to fabricate aluminum/polymer/aluminum (Al/polymer/Al) structured devices, and filament formation mechanism was proposed to interpret the switching behaviors. [37][38][39] However, the formation of metal filament is not the intrinsic characteristics of these polymers, which in turn is resulting from the physical damages of the devices.…”
Section: Introductionmentioning
confidence: 99%
“…[ 9–19 ] Among which, polymeric material has attracted more attentions due to its typical advantages as solution processability, structural tunability, three‐dimension stacking, large‐scale flexibility, etc. [ 20–25 ]…”
Section: Introductionmentioning
confidence: 99%
“…An atomic switch is considered as a suitable candidate to replace dynamic random-access memory (DRAM) or FLASH memory devices in modern computing and information technology due to its high-speed read/write access (∼10 ns, like DRAM devices) and capability to recollect data when the power supply is off (non-volatile; like FLASH memory devices) [1][2][3]. Atomic switches are also attractive because of their simple design, with a dielectric layer (polymer materials, perovskites, metal halides, and various classical transition-metal oxides) [4][5][6][7][8] packed between an electrochemically active top electrode (Cu, Ag) and electrochemically inert (Pt, W, ITO, etc,) bottom electrode [9][10][11][12]. The resistive switching (RS) in an atomic switch depends on the growth of the conductive filament (CF) and can be verified by the electro-redox (cation migration is driven by the electric field) process or in situ investigation by transmission electron microscopy and conductive atomic force microscopy (C-AFM) [13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, conductive-bridge random access memory (CBRAM) devices have been intensively investigated as an exciting alternative for next-generation memory devices because of their high switching speed, low power consumption, high on/off ratio, and complementary metal oxide semiconductor compatibility [1][2][3]. The resistive switching (RS) of CBRAM is defined by the formation/dissolution of the conductive filament (CF), which acts as a bridge between the electrochemically active metal electrode (Cu, Ag) and the inert bottom electrode (Pt, W) [4][5][6]. However, uncontrolled growth of the CF leads to poor RS performance.…”
Section: Introductionmentioning
confidence: 99%