Polymer/Silicon Hard Magnetic Micromirrors

Weber, Niklas; Hertkorn, D.; Zappe, Hans; Seifert, Andreas

doi:10.1109/jmems.2012.2203100

Cited by 25 publications

(15 citation statements)

References 14 publications

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“…One such use is as optical switches controlled by an electrostatic combdrive actuating a vertically fabricated mirror in a 2 × 2 switch [1]. Another use of micromirrors is for optical biomedical imaging, especially with angular scanning in endoscopic imaging [2]- [5]. In addition, electromagnetic micromirrors can be used to perform rapid 2D raster scanning for picoprojectors [6].…”

Section: Introductionmentioning

confidence: 99%

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Samuelson

Xie

2014

J. Microelectromech. Syst.

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A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9mm × 1.9mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25°and a strongly linear motion of 90 µm achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.[ 2013-0112]Index Terms-Bimorph, microelectromechanical systems (MEMS), vertical displacement, piston.

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Section: Introductionmentioning

confidence: 99%

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Samuelson

Xie

2014

J. Microelectromech. Syst.

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“…Typical fill factors of magnetic powder/polymer composites are around 35-44% [27], [28]. Higher fill factors have been previously developed for spincoated thin films [29], but homogeneity of the magnet material is an issue. Homogeneity of the magnetic powder/polymer mixtures is also a major concern for reproducibility, as the powders are not uniformly distributed in the film.…”

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confidence: 99%

Integration of Thick-Film Permanent Magnets for MEMS Applications

Jackson

Pedrosa

Bollero

et al. 2016

J. Microelectromech. Syst.

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This paper presents a method of integrating thick permanent magnetic films into a microfabrication process. An enhanced binding method consisting of a hybrid of Parylene N and Parylene C thin films was used in conjunction with various types of NdFeB powders to create embedded permanent magnet films. A systematic study of composite magnetic powders was developed using three different powders in order to control intrinsic coercivities (H ci ) and remanence (B r ) properties. In addition, four types of dispensing methods were investigated. A liquid dispensing method demonstrated the highest fill factor (79%) for a 400-µm-thick film with an enhanced remanence value of 0.59 T. A range of remanence values from 0.2 to 0.59 T were developed by varying the concentration of multiple magnetic powders within the composite material. Validation of the integrated magnetic material into a microelectromechanical system device was demonstrated through a polymer on a silicon cantilever structure.[ 2016-0073]Index Terms-Microelectromechanical systems (MEMS), integration, magnetic powders, bonded permanent magnets, Parylene.

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“…One is to utilize the Lorentz force [ 10 ]; this requires feeding an electric current into the device, resulting in constant power dissipation due to ohmic heating. The other is to make the entire or part of the device out of a magnetic material, and use an external magnet to actuate the device [ 11 , 12 ]. Regarding piezoelectric actuation [ 13 ], piezoelectric materials are relatively less common in semiconductor processes.…”

Section: Introductionmentioning

confidence: 99%

Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

Tsai

Chang

et al. 2015

Sensors

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Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

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Polymer/Silicon Hard Magnetic Micromirrors

Cited by 25 publications

References 14 publications

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Integration of Thick-Film Permanent Magnets for MEMS Applications

Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

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