Portable cantilever-based airborne nanoparticle detector

Wasisto, Hutomo Suryo; Merzsch, Stephan; Waag, A.; Uhde, Erik; Salthammer, Tunga; Peiner, Erwin

doi:10.1016/j.snb.2012.09.074

Cited by 49 publications

(52 citation statements)

References 26 publications

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“…The CANTOR-2 is an enhanced version of our previously developed cantilever-based airborne nanoparticle detector (CANTOR-1), which was still in a partially integrated system using a cylindrical electrophoretic NP sampler head, successfully detecting 20 nm carbon ENPs in off-line [14] and real-time measurements [15]. In this novel device, the NP sampler head has been improved in terms of its design and functionality.…”

Section: Fully Integrated Cantilever-based Airborne Nanoparticle Detementioning

confidence: 99%

“…Hence, the positively charged and uncharged NPs will be attracted and polarized to the selected cantilever surfaces by electrophoresis and dielectrophoresis mechanisms, respectively [14,20]. In the case that the NP material is more polarizable than the surrounding air a positive dielectric force on the NPs toward the region of non-uniform electrical field, i.e.…”

Section: Fully Integrated Cantilever-based Airborne Nanoparticle Detementioning

confidence: 99%

“…Real NPs can be detected using mass detectors based on micro/nanoelectromechanical systems (M/NEMS) which in addition offer the necessary potential of miniaturization and cost-effective batch fabrication. Indeed, most of the currently introduced M/NEMS-based NP mass detectors still need to be operated at high flow velocity using a pump and characterized with external bulky, heavy, and vacuum tools [10][11][12][13][14][15][16]. In contrast, our second generation of a fully integrated cantilever-based airborne NP detector (CANTOR-2) developed in this work has small size and low weight.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

Wasisto

Merzsch

Uhde

et al. 2015

Microelectronic Engineering

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Section: Fully Integrated Cantilever-based Airborne Nanoparticle Detementioning

confidence: 99%

Section: Fully Integrated Cantilever-based Airborne Nanoparticle Detementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

Wasisto

Merzsch

Uhde

et al. 2015

Microelectronic Engineering

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“…The cantilever sensor can be operated in either static or dynamic mode (where in the former relative change in cantilever deflection is measured, whereas in the later change in resonant frequency of the cantilever is gauged). Typical applications of sensing using cantilevers in dynamic mode include detection of volatile organic compound (VOC), 7 DNA, 8 airborne nanoparticles 9 to cite a few. Although, dynamic mode of operation has numerous advantages, its effectiveness curtails in liquid medium due to fluid damping effect induced reduction in sensitivity and dependence of change in resonant frequency on the position of target-receptor interactions on the cantilever.…”

Section: Introductionmentioning

confidence: 99%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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Over the years, piezoresistive nano cantilever sensors have been extensively investigated for various biological sensing applications. Piezoresistive cantilever sensor is a composite structure with different materials constituting its various layers. Design and modeling of such sensors become challenging since their response is governed by the interplay between their geometrical and constituent material parameters. Even though, piezoresistive nano cantilever biosensors have several advantages, they suffer from a limitation in the form of self-heating induced inaccuracy which is seldom considered in design stages. Although, a few simplified mathematical models have been reported which incorporate the self-heating effect, several assumptions made in the modeling stages result in inaccuracy in predicting sensor terminal response. In this paper, we model and investigate the effect of self-heating on the thermo-electro-mechanical response of piezoresistive cantilever sensors as a function of the relative geometries of the piezoresistor and the cantilever platform. Finite element method (FEM) based numerical computations are used to model the target-receptor interactions induced surface stress response in steady state and maximize the electrical sensitivity to thermal sensitivity ratio of the sensor. Simulation results show that the conduction mode of heat transfer is the dominant heat transfer mechanism. Furthermore, the isolation and immobilization layers play a critical role in determining the thermal sensitivity of the sensor. It is found that the shorter and wider cantilever platforms are more suitable to reduce self-heating induced inaccuracies. In addition, results depict that the piezoresistor width plays a more dominant role in determining the thermal drift induced inaccuracies compared to the piezoresistor length. It is found that for surface stress sensors at large piezoresistor width, the electrical sensitivity to thermal sensitivity ratio improves.

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“…In contrast, our first generation of the cantilever-based airborne NP detector (CANTOR-1) evaluated in this work has a small size, a low weight, an appropriate flow rate, an atmospheric pressure working condition, and low-cost components. This device had been successfully tested to prove the NP mass sensing principle with detected ENPs down to ∼ 20 nm in diameter (Wasisto et al, 2013a). However, these measurements were done offline, where the ENP sampling and the sensor characterization were performed separately and controlled manually.…”

Section: Introductionmentioning

confidence: 99%

Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

Wasisto

Merzsch

Uhde

et al. 2015

J. Sens. Sens. Syst.

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Abstract. The performance of a low-cost partially integrated cantilever-based airborne nanoparticle (NP) detector (CANTOR-1) is evaluated in terms of its real-time measurement and robustness. The device is used for direct reading of exposure to airborne carbon engineered nanoparticles (ENPs) in indoor workplaces. As the main components, a miniaturized electrostatic aerosol sampler and a piezoresistive resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and to measure their mass concentration, respectively. Moreover, to realize a real-time measurement, a frequency tracking system based on a phase-locked loop (PLL) is built and integrated into the device. Long-term ENP exposure and a wet ultrasonic cleaning method are demonstrated to estimate the limitation and extend the operating lifetime of the developed device, respectively. By means of the device calibrations performed with a standard ENP monitoring instrument of a fast mobility particle sizer (FMPS, TSI 3091), a measurement precision of ENP mass concentrations of < 55 % and a limit of detection (LOD) of < 25 µg m −3 are obtained.

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Portable cantilever-based airborne nanoparticle detector

Cited by 49 publications

References 26 publications

Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

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