Positive-tone chemically amplified photosensitive polyimides with controllable taper angles

Wang, Li-zhe; Cao, Xiaoyan; Jia, Bo; Yuan, Lifang; Yang, Haolin; Shen, Yang

doi:10.1016/j.mtchem.2023.101613

Cited by 3 publications

(2 citation statements)

References 37 publications

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“…Wang et al developed a PSPI capable of generating adjustable cone angle photo patterns with a resolution of 3 μm. By optimizing the protection ratio of the PI resin, high film retention and wide optical patterning windows were achieved . Thus far, most PSPI reports based on PI have used flexible diamines and dianhydrides, which have characteristics such as good solubility, high molecular weight, and simple synthesis processes but might cause their thermal properties to decline.…”

Section: Introductionmentioning

confidence: 99%

“…By optimizing the protection ratio of the PI resin, high film retention and wide optical patterning windows were achieved. 15 Thus far, most PSPI reports based on PI have used flexible diamines and dianhydrides, which have characteristics such as good solubility, high molecular weight, and simple synthesis processes but might cause their thermal properties to decline. Therefore, achieving a balance between solubility and thermal performance by adjusting the main chain structure remains a challenge.…”

Section: Introductionmentioning

confidence: 99%

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Highly Rigid and Functional Polyimides Based on Noncoplanar Benzimidazolone Diamines and Their Photolithography Application

Zhu,

Su,

et al. 2024

ACS Appl. Polym. Mater.

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It is of significance to develop a photosensitive polyimide for the demand of further integration and miniaturization of integrated circuits. In the current work, the rigid benzimidazolone-derived diamines and the corresponding photosensitive polyhydroxyimide were successfully developed. All polyimides exhibit excellent processability and comprehensive physical properties. Especially, our fluorinated polyhydroxyimide has all the desirable properties for a patterning process which includes high glass transition temperature (369 °C), low dielectric constant (2.94 at 1 MHz), and excellent optical transparency (λ cutoff as low as 332 nm). Based on this fluorinated polyhydroxyimide, our photosensitive polyimide has a sensitivity of 172 mJ cm −2 and a contrast of 4.2, and fine positive patterns with resolutions of 5 and 10 μm were achieved. This provides a feasible framework for expanding the application of benzimidazolone polyimide.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Highly Rigid and Functional Polyimides Based on Noncoplanar Benzimidazolone Diamines and Their Photolithography Application

Zhu,

Su,

et al. 2024

ACS Appl. Polym. Mater.

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Synthesis of Photosensitive Polyimides Incorporating Polydimethylsiloxane Segments and Studies on the Properties of their UV-Cured Films

Fu,

Huang,

Huang

et al. 2024

ACS Appl. Polym. Mater.

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To reduce the limitations of traditional polyimides (PIs), such as poor processability, limited flexibility, and low solubility, a series of siloxane-modified photosensitive PIs (PSPIs, designated as D1∼D6) were designed and synthesized. The cured films of these PSPIs were prepared by UV irradiation. In comparison to conventional PIs, the cured films exhibited good heat tolerance, enhanced flexibility, and a lower glass transition temperature. Some films demonstrated very good mechanical properties, low dielectric characteristics, and excellent hydrophobicity, with a maximum tensile strain of 66%, a low dielectric constant as low as 2.7, a high surface contact angle of 113°, and a minimal moisture absorption as low as 0.02%. These cured films hold great potential for applications in packaging and solder mask protection for highfrequency, high-speed printed circuit boards (PCBs).

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Advancements in Synthesis Strategies and Optoelectronic Applications of Bio-Based Photosensitive Polyimides

Yu,

Ma,

Chang

et al. 2024

International Journal of Optics

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With the rapid development of information, energy, and materials industries in China, the demand for high-performance polymers is gradually increasing. Photosensitive polyimide (PSPI) has emerged as an ideal choice for high-performance optoelectronic materials due to its outstanding thermal stability, mechanical strength, and low dielectric constant. In particular, bio-based photosensitive polyimide prepared from bio-based chemicals, as a green polymer material, not only reflects the advantages of environmental protection and resource efficiency but also contributes to carbon neutrality. However, how to improve the photolithography efficiency while maintaining the thermodynamic performance and environmental friendliness and how to balance the pros and cons of low-molecular-weight matrixes are still challenges in the research. This review systematically summarizes the synthesis and performance characteristics of photosensitive polyimides, bio-based polyimide, and bio-based photosensitive polyimides and further explores the future application prospects of bio-based polyimides in the field of high-performance optoelectronic materials.

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Positive-tone chemically amplified photosensitive polyimides with controllable taper angles

Cited by 3 publications

References 37 publications

Highly Rigid and Functional Polyimides Based on Noncoplanar Benzimidazolone Diamines and Their Photolithography Application

Highly Rigid and Functional Polyimides Based on Noncoplanar Benzimidazolone Diamines and Their Photolithography Application

Synthesis of Photosensitive Polyimides Incorporating Polydimethylsiloxane Segments and Studies on the Properties of their UV-Cured Films

Advancements in Synthesis Strategies and Optoelectronic Applications of Bio-Based Photosensitive Polyimides

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