2019
DOI: 10.1016/j.surfcoat.2019.06.100
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Post-annealing of (Ti,Al,Si)N coatings deposited by high speed physical vapor deposition (HS-PVD)

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Cited by 20 publications
(9 citation statements)
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“…If the thermal stability of the coating is weak, the service life of the workpiece will be greatly reduced. The subsequent heat treatment of the deposited coating at an appropriate temperature can effectively release the residual stress, reduce the internal defects, homogenize the internal elements, and further improve the performance of the coating [18,19].…”
Section: Introductionmentioning
confidence: 99%
“…If the thermal stability of the coating is weak, the service life of the workpiece will be greatly reduced. The subsequent heat treatment of the deposited coating at an appropriate temperature can effectively release the residual stress, reduce the internal defects, homogenize the internal elements, and further improve the performance of the coating [18,19].…”
Section: Introductionmentioning
confidence: 99%
“…During physical vapor deposition (PVD), single or multiple source materials are evaporated or sputtered in a high vacuum . Subsequently, the formed atoms, molecules, or ions are transferred to the surface of substrate, leading to the nucleation and growth of a thin film .…”
Section: Advanced Surface‐modification Methodsmentioning
confidence: 99%
“…During physical vapor deposition (PVD), single or multiple source materials are evaporated or sputtered in a high vacuum. [438,439] Subsequently, the formed atoms, molecules, or ions are transferred to the surface of substrate, leading to the nucleation and growth of a thin film. [438,440] Although PVD is classified as physical method, some reactions with the materials surface may still take place to facilitate the growth of film.…”
Section: Physical Vapor Depositionmentioning
confidence: 99%
“…Moreover, previous studies have shown that (Ti,Al,Si)N coatings, deposited by HS‐PVD, had a promising potential for the erosion protection of compressor blades, due to their dense microstructures, smooth surfaces, and a high bonding strength between coating and substrate. [ 31,32 ]…”
Section: Introductionmentioning
confidence: 99%