1998
DOI: 10.1088/0953-8984/10/5/022
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Post-implantation annealing of SiC studied by slow-positron spectroscopies

Abstract: The effects of post-implantation annealing of damage in 6H-SiC caused by ion implantation at two different fluences have been studied by monoenergetic positron Doppler broadening and lifetime techniques. The measurements are supported by new calculations of positron lifetimes in vacancy clusters in SiC. At both fluences two defected layers are identified and characterized by depth and defect type as a function of annealing temperature. The results indicate that it is impossible to remove the radiation damage b… Show more

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Cited by 35 publications
(23 citation statements)
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“…The results obtained are similar to those reported earlier for 3C-and 6H-SiC. 10 Our calculations give for the positron lifetime in bulk SiC a value of b = 143.7 ps, in agreement with the measured value b = 149.6 ps. When using the theoretical calculations to determine the measured cluster sizes, we compare the differences between the bulk and defect lifetimes.…”
Section: Vacancy Clusterssupporting
confidence: 91%
See 1 more Smart Citation
“…The results obtained are similar to those reported earlier for 3C-and 6H-SiC. 10 Our calculations give for the positron lifetime in bulk SiC a value of b = 143.7 ps, in agreement with the measured value b = 149.6 ps. When using the theoretical calculations to determine the measured cluster sizes, we compare the differences between the bulk and defect lifetimes.…”
Section: Vacancy Clusterssupporting
confidence: 91%
“…[8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23][24] ͒. These studies often involve irradiated materials.…”
Section: Introductionmentioning
confidence: 99%
“…Vacancy clusters are estimated to be formed by 4-5 V Zn -V O missing pairs by comparing to lifetime ratios in SiC, where they were thoroughly studied. 22,23 Vacancy clusters with a lifetime of 340 ps have been previously observed in bulk ZnO samples. 24 Its intensity remains approximately constant in both ZnCdO films (E $ 5-15 keV) around 40%-60%.…”
Section: Lifetime Pasmentioning
confidence: 71%
“…We first examined the crystallinity of the samples after implantation. Figure S2 According to our previous positron annihilation experiments [25,26,28,42,43], divacancies have been identified in neutron or ion irradiated SiC. They also dominate defects after annealing [43].…”
Section: Resultsmentioning
confidence: 68%
“…Figure S2 According to our previous positron annihilation experiments [25,26,28,42,43], divacancies have been identified in neutron or ion irradiated SiC. They also dominate defects after annealing [43]. divacancies based on estimation according to a scaling curve for defects in 6H-SiC [44].…”
Section: Resultsmentioning
confidence: 83%