Abstract-Decoupling capacitors are widely used to reduce power supply noise. On-chip decoupling capacitors have traditionally been allocated into the white space available on the die based on an unsystematic or ad hoc approach. In this way, large decoupling capacitors are often placed at a significant distance from the current load, compromising the signal integrity of the system. This issue of power delivery cannot be alleviated by simply increasing the size of the on-chip decoupling capacitors. To be effective, the on-chip decoupling capacitors should be placed physically close to the current loads. The area occupied by the onchip decoupling capacitor, however, is directly proportional to the magnitude of the capacitor. The minimum impedance between the on-chip decoupling capacitor and the current load is therefore fundamentally affected by the magnitude of the capacitor.A distributed on-chip decoupling capacitor network is proposed in this paper. A system of distributed on-chip decoupling capacitors is shown to provide an efficient solution for providing the required on-chip decoupling capacitance under existing technology constraints. In a system of distributed onchip decoupling capacitors, each capacitor is sized based on the parasitic impedance of the power distribution grid. Various tradeoffs in a system of distributed on-chip decoupling capacitors are also discussed. Related simulation results for typical values of on-chip parasitic resistance are also presented. An analytic solution is shown to provide accurate distributed system. The worst case error is 0.003% as compared to SPICE. Techniques presented in this paper are applicable not only for current technologies, but also provide an efficient placement of the onchip decoupling capacitors in future technology generations.