Precision tracking of a piezo-driven stage by charge feedback control

Chen, Lien-Sheng; Yen, Jia‐Yush; Chen, Jack J. H.; Kuo, Fu-Cun; Chen, Min‐Shin; Chen, Yung-Yaw; Chung, Ben-I.

doi:10.1016/j.precisioneng.2013.03.002

Cited by 19 publications

(15 citation statements)

References 21 publications

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“…1. Piezo-actuated stage [22]. [Color figure can be viewed at wileyonlinelibrary.com] the piezoelectric actuator is first proposed to lay the foundation of the control design.…”

Section: System Modelingmentioning

confidence: 99%

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Adaptation‐Enhanced Model‐Based Control with Charge Feedback for Piezo‐Actuated Stage

Yeh

Yen

2018

Asian Journal of Control

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This paper proposes a new control design to compensate for the residual control error from charge feedback control. A part of the applied voltage is consumed by the hysteresis effect because of the nature of the piezoelectric material; moreover, this effect is difficult to overcome because it is rate dependent. This work utilizes a piezoelectric electromechanical model to propose a precompensation algorithm for a piezoelectric actuator. A nonlinear compensator can be used to treat both the hysteresis nonlinearity and the rate dependency of the system, and the adjustable parameters are specified through adaptive identification with only basic system information. The proposed design can position a piezoelectric stage with a magnifying mechanism within a few nanometers of a target, and the leftover hysteresis phenomenon is negligible.

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“…1. Piezo-actuated stage [22]. [Color figure can be viewed at wileyonlinelibrary.com] the piezoelectric actuator is first proposed to lay the foundation of the control design.…”

Section: System Modelingmentioning

confidence: 99%

“…In the electrical subsystem, the control signal u is divided into the nonlinear hysteresis u h , linear transduction voltage u p , and measurement voltage u c . Different from the system models in [1,22,27] the effect of measuring capacitance C c is considered in this paper, which can be expressed as…”

Section: System Modelingmentioning

confidence: 99%

Adaptation‐Enhanced Model‐Based Control with Charge Feedback for Piezo‐Actuated Stage

Yeh

Yen

2018

Asian Journal of Control

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“…Although electrical charge control can attenuate the hysteresis using linear relationship between the charge and displacement [4], [5], it is not practical due to the complexity of the implementation and the reduction in the operating range. Thus, the voltage driving control is widely adopted and the hysteresis modeling is the key point of this method.…”

Section: Introductionmentioning

confidence: 99%

A Hybrid Feedforward-Feedback Hysteresis Compensator in Piezoelectric Actuators Based on Least-Squares Support Vector Machine

Mao

Wang

Liu

et al. 2018

IEEE Trans. Ind. Electron.

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Hysteresis nonlinearity of piezoelectric actuators degrades the positioning accuracy of micro-/nano-positioning systems. To overcome this problem, an innovative hysteresis compensator based on least squares support vector machine (LSSVM) is proposed in this paper. First, the LSSVM hysteresis modeling is presented using Nonlinear Auto Regressive eXogenous (NARX) structure. To compensate for the hysteresis behavior, two feedforward control schemes according to different inputs of NARX model are proposed and analyzed separately. Then, a hybrid feedforward controller combining both the control schemes is put forward to revise the model input. To further improve the tracking performance, the hybrid feedforward control combined with the feedback control is realized. The comparative study reveals the superior tracking performance of feedforward-feedback control scheme over hybrid feedforward control or feedback control. Moreover, the hybrid feedforward-feedback control scheme is capable of tracking different testing waveforms with negligible errors, which confirms the effectiveness and generalization ability of the proposed approach.

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“…But the motion range is limited, and the creep, hysteresis and nonlinearity cannot be ignored. [1][2][3] Ultrasonic actuators are usually good at reaching high-speed motions and large ranges in small sizes, which are based on the elliptical motion of the contacting surface. However, the resolution and output capability are still the problems.…”

Section: Introductionmentioning

confidence: 99%

Design and experimental research of an improved stick–slip type piezo-driven linear actuator

Zhao

Shao

et al. 2015

Advances in Mechanical Engineering

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A piezo-driven linear actuator based on the improved stick-slip principle is developed in this article. With the help of two piezo-stacks and flexure hinges, the preload force can be changed, so the designed actuator can realize relatively large linear ranges and large output force. The designed actuator mainly consists of the mover, the stator, two piezostacks, an adjusting stage and the base. The working principle and theoretical analysis are described. A prototype actuator was fabricated and a series of experiments were carried out to investigate the work characteristics of it. Experimental results indicate that the maximum speed is about 3.086 mm/s and the maximum output force is 0.98 N. They are both improved compared with the traditional stick-slip motion. Experimental results confirm that the proposed actuator can realize large output force relatively and different motion speeds with high accuracy under different driving voltages and frequencies.

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Precision tracking of a piezo-driven stage by charge feedback control

Cited by 19 publications

References 21 publications

Adaptation‐Enhanced Model‐Based Control with Charge Feedback for Piezo‐Actuated Stage

Adaptation‐Enhanced Model‐Based Control with Charge Feedback for Piezo‐Actuated Stage

A Hybrid Feedforward-Feedback Hysteresis Compensator in Piezoelectric Actuators Based on Least-Squares Support Vector Machine

Design and experimental research of an improved stick–slip type piezo-driven linear actuator

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