Abstract:It has often been observed that an element locating in an underlayer can segregate to the top surface of a layered structure. Whether in a vacuum or inert atmosphere, a method for predicting such segregation has been previously established. However, the annealing of a layered structure is sometimes carried out in an oxygen atmosphere. Therefore, the influence of oxygen in an annealing atmosphere upon the surface segregation behavior in layered materials is discussed here in. The energetics of oxygen adsorption… Show more
“…54,55) Based on the thermal diffusion theory with the metal/Li stack structure considering the oxygen vacancy formed interface, the adsorption energy of Zn (190 kJ mol −1 ) is between those of Mg (150 kJ mol −1 ) and Ti (232 kJ mol −1 ), meaning that Li can diffuse into ZnO as same as into MgO and TiO x . 56,57) The LN inversion layer should be formed near the interface by annealing at 900 °C. Furthermore, Li and Nb act as accepter and donor in ZnO, respectively.…”
Section: Surface Potential and Energy Band Alignmentmentioning
Effects of polarity and pyroelectricity of LiNbO 3 (LN) on electrical properties of ZnO film were investigated. The ZnO films were annealed at 500 °C and 900 °C under an oxygen atmosphere to reduce the interface defects. Current-voltage (I-V ) and surface potential measurements showed that the as deposited ZnO did not show polarity dependence. The ZnO annealed at 500 °C on +LN and −LN showed semiconducting and metallic behaviors at low temperature, respectively. X-ray photoelectron spectroscopy revealed that the polarization of LN changed the band alignment of ZnO/LN interface. In addition, the pyroelectricity increased the band bending, resulting in the enhancement of semiconducting and metallic properties for +LN and −LN, respectively. Especially, the resistivity of ZnO annealed at 500 °C changed by 5-digit from 80 to 500 K. The pyroelectricity and polarity of LN should contribute to modulating the electrical properties of ZnO for environment sensing devices.
“…54,55) Based on the thermal diffusion theory with the metal/Li stack structure considering the oxygen vacancy formed interface, the adsorption energy of Zn (190 kJ mol −1 ) is between those of Mg (150 kJ mol −1 ) and Ti (232 kJ mol −1 ), meaning that Li can diffuse into ZnO as same as into MgO and TiO x . 56,57) The LN inversion layer should be formed near the interface by annealing at 900 °C. Furthermore, Li and Nb act as accepter and donor in ZnO, respectively.…”
Section: Surface Potential and Energy Band Alignmentmentioning
Effects of polarity and pyroelectricity of LiNbO 3 (LN) on electrical properties of ZnO film were investigated. The ZnO films were annealed at 500 °C and 900 °C under an oxygen atmosphere to reduce the interface defects. Current-voltage (I-V ) and surface potential measurements showed that the as deposited ZnO did not show polarity dependence. The ZnO annealed at 500 °C on +LN and −LN showed semiconducting and metallic behaviors at low temperature, respectively. X-ray photoelectron spectroscopy revealed that the polarization of LN changed the band alignment of ZnO/LN interface. In addition, the pyroelectricity increased the band bending, resulting in the enhancement of semiconducting and metallic properties for +LN and −LN, respectively. Especially, the resistivity of ZnO annealed at 500 °C changed by 5-digit from 80 to 500 K. The pyroelectricity and polarity of LN should contribute to modulating the electrical properties of ZnO for environment sensing devices.
“…To reduce the leakage current and improve the temperature stability of dielectric constant, Ta was doped. Ta is able to reduce oxygen vacancies owing to its low oxidization energy, and inhibit the Bi migration in the BT-BMN layer at high temperature on the basis of the thermal diffusion theory (17)(18)(19). To investigate the Ta doping effects, a Ta composition spread sample was fabricated by combinatorial method as shown in Fig.…”
Section: Doping Concentration Optimization By Combinatorial Synthesismentioning
The development of high-dielectric constant film materials is essential for future active and passive nanoelectronics devices. By using combinatorial synthesis, high throughput material development, we developed high-dielectric constant film materials for film capacitor and gate dielectrics. In this paper, the combinatorial synthesis method and achievements concerning the dielectric materials for high temperature operational thin film capacitor and high-k dielectrics are briefly introduced.
“…To reduce the leakage current and improve the temperature stability of dielectric constant, Ta was doped. Ta is able to reduce oxygen vacancies owing to its low oxidization energy, and inhibit the Bi migration in the BT-BMN layer at high temperature on the basis of the thermal diffusion theory [32][33][34]. To investigate the Ta doping effects, a Ta composition spread sample was fabricated by combinatorial method as shown in the inset of Fig.…”
Section: Ta Doping Effects On Dielectric Propertiesmentioning
The development of high-dielectric constant thin film materials is essential for future active and passive nanoelectronics devices. Recently we developed high-dielectric constant thin film materials for thin film capacitor and gate dielectrics by combinatorial technique. Combinatorial thin-film of (1-x)[BaTiO 3 ]-x[Bi(Mg 2/3 Nb 1/3 )O 3 ]-(BT-BMN) was grown on Pt/SiO 2 /Si, using pulse laser deposition (PLD) method, by deviating from stoichiometry and Bi-10 wt% enriched targets to optimize the Bi content. X-ray photoelectron spectroscopy analysis revealed a linear Bi composition spread. As-deposited films post-annealed at high-temperatures under oxygen atmospheres turned into crystalline state and the crystallinity, characterized by the full width at half maximum of x-ray diffraction, is better towards Bi-enriched end. The dielectric constant showed a strong dependency of Bi composition and it increased with the increase of Bi and saturated over 7 wt% Bi. The scanning nonlinear dielectric microscopic investigation revealed that ferroelectric phase distribution is better around Bi-7 wt% region where the measured leakage current is also minimum. This tendency suggests that nonstoichiometric Bi concentration in the PLD target influences the thin-film electrical properties. Dielectric constant over 300 and dielectric constant stability below 10% from 25 to 400 °C were obtained.
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