2004
DOI: 10.1016/j.apsusc.2004.05.033
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Preferential immobilization of biomolecules on silicon microstructure array by means of electron beam lithography on organosilane self-assembled monolayer resist

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Cited by 26 publications
(15 citation statements)
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“…Various protocols describing the immobilization of oligonucleotides onto surfaces can be found in the literature 23–24, 32–33. Unfortunately, lack of experimental details or characterization aspects prevented us from preparing suitable surfaces for our purposes based on these studies.…”
Section: Resultssupporting
confidence: 91%
“…Various protocols describing the immobilization of oligonucleotides onto surfaces can be found in the literature 23–24, 32–33. Unfortunately, lack of experimental details or characterization aspects prevented us from preparing suitable surfaces for our purposes based on these studies.…”
Section: Resultssupporting
confidence: 91%
“…Unlike the process described in Ref. [13], the lift-off is performed after the glutaraldehyde grafting because the molecule is very reactive and will be physisorbed on the substrate if the resist is removed before. The lift-off is facilitated by the large difference between the thickness of the PMMA layer and the APTES one, 270 nm against 1 nm.…”
Section: Functionalization Processmentioning
confidence: 99%
“…[50] It is also possible to chemically modify SAMs in a specific manner by electrons. [33,[52][53][54][55][56][57][58][59] …”
Section: Nanoscaled Lateral Structurization Of Sams For Surface Functmentioning
confidence: 99%