Preparation and characterization of piezoelectric ceramic–polymer composite thick films by aerosol deposition for sensor application

Choi, Jong‐Jin; Hahn, Byung‐Dong; Ryu, Jungho; Yoon, Woon‐Ha; Lee, Byoung-Kuk; Park, Dong-Soo

doi:10.1016/j.sna.2009.04.025

Cited by 58 publications

(26 citation statements)

References 18 publications

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“…Recently, a number of articles were published on 0-3 composites showing an increased demand on this type of composites [7][8][9][10]. The recently developed PZT/ liquid crystalline thermosets (LCT) [11] composites by van den Ende et al [12] showed excellent high temperature stability.…”

Section: Introductionmentioning

confidence: 99%

Processing and characterization of piezoelectric 0-3 PZT/LCT/PA composites

Babu¹,

Ende²,

With³

2010

J. Phys. D: Appl. Phys.

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. Lichtenecker) of 0-3 composites. In order to assess the correlation of the experimental data with the theoretical models, the experimental data obtained from PZT/PA composites were also included.Confidential: not for distribution.

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Section: Introductionmentioning

confidence: 99%

Processing and characterization of piezoelectric 0-3 PZT/LCT/PA composites

Babu¹,

Ende²,

With³

2010

J. Phys. D: Appl. Phys.

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“…This technique offers the possibility of synthesizing films on a wide variety of substrates ranging from polymeric or metal to ceramics. [5][6][7] During the AD process, the micrometer-sized particles become accelerated at high speeds and collide with the substrate to form polycrystalline film. The deposited films exhibit small grain size, typically in the range of tens of nanometers.…”

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confidence: 99%

Stress-controlled Pb(Zr0.52Ti0.48)O3 thick films by thermal expansion mismatch between substrate and Pb(Zr0.52Ti0.48)O3 film

Han

Ryu

Yoon

et al. 2011

Journal of Applied Physics

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Polycrystalline Pb(Zr0.52Ti0.48)O3 (PZT) thick films (thickness ∼10 μm) were successfully fabricated by using a novel aerosol deposition technique on Si wafer, sapphire, and single crystal yitria stabilized zirconia (YSZ) wafer substrates with Pt electrodes and their dielectric, ferroelectric, and piezoelectric properties, and in-plane stresses were investigated. The films with different stress conditions were simply controlled by the coefficient of thermal expansion (CTE) misfit of PZT films and substrates. The results showed that the films bearing in-plane compressive stress deposited on the YSZ and sapphire substrates have superior dielectric, ferroelectric (∼90%), and piezoelectric (>200%) properties over that of the Si wafer. Among these three substrates, YSZ shows superior properties of the PZT films. However, films on Si wafer with tensile stress present lower properties. We believed that in-plane compressive stresses within the films are benefited, the formation of c-domain parallel to the thickness direction resulting in the higher piezoelectric properties. These results suggest that the properties of polycrystalline PZT thick films can be adjusted by simply choosing the substrates with different CTEs.

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“…These studies indicated that particle fragmentation occurs upon impact with the substrate during NPDS; sufficient energy for bonding is released upon impact, resulting in phase change [4]. Recently, several ADM studies reported improvement in the electrical and thermal properties of coated substrates by mixing materials such as Al 2 O 3 , TiO 2 , lead zirconate titanate (PZT), hydroxyapatite, carbon nanotubes (CNTs), and graphene powders, with applications for sensor, secondary battery cell, photocatalyst, and biomaterial enhancement [9][10][11][12][13][14]. However, till date, the details of the deposition mechanism for mixed-component systems are not well understood.…”

Section: Introductionmentioning

confidence: 99%