Abstract:In this paper, we report a new method to grow graphene monolayers directly on a quartz substrate using chemical vapor deposition (CVD), without using any catalyst. For this purpose, ethanol as the precursor and a quartz substrate were used for growth, which controlled the growth process and the formation of an ultrathin layer of graphene. In this project, with use of plasmaenhanced chemical vapor deposition (PECVD), the substrate was cleaned by applying the cold plasma with the aim of improving the quality of … Show more
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