Molecular beam epitaxy is used to grow TiSe2 ultrathin films on graphitized SiC(0001) substrate. TiSe2 films proceed via a nearly layer-by-layer growth mode and exhibit two dominant types of defects, identified as Se vacancy and interstitial, respectively. By means of scanning tunneling microscopy, we demonstrate that the well-established charge density waves can survive in single unit-cell (one triple layer) regime, and find a gradual reduction in their correlation length as the density of surface defects in TiSe2 ultrathin films increases. Our findings offer important insights into the nature of charge density wave in TiSe2, and also pave a material foundation for potential applications based on the collective electronic states. 68.37.Ef Transition metal dichalcogenides (TMDCs) typically crystallize into layered structures via weak van der Waals attraction between adjacent layers and exhibit a variety of technologically fascinating physical properties. Like graphene, a body of distinctively promising phenomena emerges when the TMDC bulk crystals are thinned down to mono-or few-layers, which have recently attracted considerable interests in condensed matter physics and materials science. 1 These phenomena include, for example, realization of the two-dimensional (2D) semiconductor with a direct band gap in the visible range, 2,3 broken parity symmetry, 4,5 pronounced spinorbital coupling/splitting, 6,7 and extremely large exciton binding energy. 8 The intriguing physical properties in TMDC monolayers can be employed to develop applications in optoelectronics, valleytronics, spintronics and energy storages. 1-8 Some of layered TMDCs are found to exhibit generic instabilities towards the symmetryreducing charge density wave (CDW) and superconductivity, and therefore provide unprecedented opportunities to investigate their interplays. Parallels between TMDCs and cuprates, both of which share similar ground states, have indeed been recently claimed. 9 Titanium diselenide (TiSe 2 ), a semimetal in nature with hexagonally packed TiSe 6 octahedra (1T ), 10-12 represents a widely studied and interesting TMDC. It undergoes a second-order phase transition to nonchiral CDW with a commensurate 2 × 2 × 2 superstructure at the CDW transition temperature T CDW ∼ 200 K, 13 and then to chiral CDW at a slightly lower temperature. 14 Yet, in spite of more than three decades of intensive experimental and theoretical endeavors, the driving force for the CDW transition remains unsettled. Upon intercalation with copper 15 or applying pressure, 16 the CDW ordering melts and superconductivity develops with a critical transition temperature of several Kelvin, indicating com-petition between CDW and superconductivity in TiSe 2 . Recently, self-induced topologically nontrivial and chiral superconducting phases have been predicted in pressurized TiSe 2 17 and TiSe 2 monolayer, 18 respectively, which might harbor the long-pursuing Majorana fermions. 19 According to Raman spectroscopy study, T CDW can be enhanced as the thickness of mechan...