Pressure sensor using p-type polycrystalline diamond piezoresistors

Yamamoto, Akira; Nawachi, Norio; Tsutsumoto, Takahiro; Terayama, Akira

doi:10.1016/j.diamond.2004.09.001

Cited by 25 publications

(15 citation statements)

References 11 publications

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“…Piezoresistive micro-sensors, such as pressure sensor, accelerometer and the strain sensor in cochlear probe, were also reported in [11][12][13][14][15][16]. Generally, GF of poly-C increases with the increase of resistivity, grain size and operation temperature.…”

Section: Methodsmentioning

confidence: 99%

Piezoresistive sensor technology for RFMEMS using p-type polycrystalline diamond

Cao

Aslam

2009

2009 IEEE Nanotechnology Materials and Devices Conference

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Design, simulation, fabrication and testing of p-type polycrystalline diamond (poly-C) piezoresistive RFMEMS is reported for the first time. The use piezoresistive detection in RFMEMS can lead to an output impedance in the ranges of 20 -500 Ω and several MΩ for intra-and inter-grain piezoresistors, respectively. The inter-grain gauge factor of the poly-C film with a resistivity of 22 ⋅ Ω cm was estimated to be over 20. An Ohmic contact with a contact resistance of 5.21 MΩ was achieved by using a highly-doped poly-C interlayer between metal and lightly-doped piezoresistor.

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Section: Methodsmentioning

confidence: 99%

Piezoresistive sensor technology for RFMEMS using p-type polycrystalline diamond

Cao

Aslam

2009

2009 IEEE Nanotechnology Materials and Devices Conference

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“…Hence, the drive-detection symmetry is lost and the piezoresistive method can only be used for detection. For static measurements diamond piezoresistivity has been exploited for biological 35,36 and pressure-sensing devices, 37 an example is depicted in Figure 17.10. In short, the diamond window will bulge as the pressure on either side of it changes, resulting in a change of strain in the window.…”

Section: Piezoresistive Techniquementioning

confidence: 99%

Diamond Nano-electromechanical Systems

Mohanty

Imboden

2014

Nanodiamond

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Nano-electromechanical systems (NEMS) are extraordinary in their ability to transduce minute mechanical signals into an electrical response. The methods of inducing and detecting mechanical, electrical, or biological signals using diamond NEMS structures are discussed in this chapter. Diamond, with its unique mechanical, thermal, and chemical properties, is a fascinating material. It often outperforms conventional NEMS materials, such as silicon. Advances in thin-film growth and fabrication methods now make it possible to manufacture ever more sensitive devices with far-reaching implications in both applied and fundamental research. This chapter illustrates the inner workings of diamond NEMS devices. Furthermore, opportunities and technological challenges in the field of diamond NEMS are discussed.

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“…The refractive index of diamond is 2.4168 (at 587.6 nm) and optically transparent between the deep ultra-violate and the infrared ranges [27]. Although there have been other types of pressure sensors based on diamond piezoresistors [28,29,30,31,32], there is only a limited number of works on optical fiber pressure sensor made of the diamond diaphragm [33]. In this work, a fiber optic sensor fabrication method was used, which makes use of dual polymer-ceramic adhesive for low-cost fabrication and relatively high operation temperature (~275 °C).…”

Section: Introductionmentioning

confidence: 99%

Miniature Diamond-Based Fiber Optic Pressure Sensor with Dual Polymer-Ceramic Adhesives

Bae

Giri

Kolawole

et al. 2019

Sensors

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Diamond is a good candidate for harsh environment sensing due to its high melting temperature, Young’s modulus, and thermal conductivity. A sensor made of diamond will be even more promising when combined with some advantages of optical sensing (i.e., EMI inertness, high temperature operation, and miniaturization). We present a miniature diamond-based fiber optic pressure sensor fabricated using dual polymer-ceramic adhesives. The UV curable polymer and the heat-curing ceramic adhesive are employed for easy and reliable optical fiber mounting. The usage of the two different adhesives considerably improves the manufacturability and linearity of the sensor, while significantly decreasing the error from the temperature cross-sensitivity. Experimental study shows that the sensor exhibits good linearity over a pressure range of 2.0–9.5 psi with a sensitivity of 18.5 nm/psi (R2 = 0.9979). Around 275 °C of working temperature was achieved by using polymer/ceramic dual adhesives. The sensor can benefit many fronts that require miniature, low-cost, and high-accuracy sensors including biomedical and industrial applications. With an added antioxidation layer on the diamond diaphragm, the sensor can also be applied for harsh environment applications due to the high melting temperature and Young’s modulus of the material.

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Pressure sensor using p-type polycrystalline diamond piezoresistors

Cited by 25 publications

References 11 publications

Piezoresistive sensor technology for RFMEMS using p-type polycrystalline diamond

Piezoresistive sensor technology for RFMEMS using p-type polycrystalline diamond

Diamond Nano-electromechanical Systems

Miniature Diamond-Based Fiber Optic Pressure Sensor with Dual Polymer-Ceramic Adhesives

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