Principles of Bragg-Fresnel multilayer optics

Аристов, В. В.; Erko, Alexei; Martynov, V. V.

doi:10.1051/rphysap:0198800230100162300

Cited by 43 publications

(11 citation statements)

References 16 publications

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“…Our fit includes interdiffusion parameters [see Eq. (34)] between each of these four layers of σ 0.4 nm, which agrees well with the AFM measurement of the top surface of the uncut multilayer of 0.42 nm RMS. In addition, we model the surface of the structure as a 5.4 nm layer of MoSi 2 terminated with 4.8 nm of SiO 2 .…”

Section: Fabrication Of Sliced Multilayers a Low-stress Thick Multilsupporting

confidence: 84%

“…The 2020-period multilayer reported here is one of the thickest made, and yet when cut at an angle Φ 7.8°intersects a beam height of only 110 μm. The effective height of the cut can be increased by cutting or etching a sawtooth pattern into the multilayer stack to produce a so-called Bragg-Fresnel multilayer optic [34,35]. These types of structures have achieved bandwidths of 10 −6 [36].…”

Section: Applications Of Sliced Multilayers a Monochromator Or Spectmentioning

confidence: 99%

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High-efficiency x-ray gratings with asymmetric-cut multilayers

Bajt¹,

Chapman

Aquila³

et al. 2012

J. Opt. Soc. Am. A

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We present the fabrication and analysis of efficient and highly dispersive gratings for the x-ray and extreme ultraviolet (EUV) regime. We show that an asymmetric-cut multilayer structure can act as a near-perfect blazed grating. The precision and high line density are achieved by layer deposition of materials, which can be controlled to the angstrom level. We demonstrate this in the EUV regime with two structures made by cutting and polishing magnetron-sputtered multilayer mirrors of over 2000 bilayers thick, each with a period of 6.88 nm. These were cut at angles of 2.9°and 7.8°to the surface. Within the 3% bandwidth rocking curve of the multilayer, the angular dispersion of the diffracted wave was in agreement with the grating equation for elements with 7250 and 19,700 line pairs/mm, respectively. The dependence of the measured efficiency was in excellent agreement with a formulation of dynamical diffraction theory for multilayered structures. At a wavelength of 13.2 nm, the efficiency of the first-order diffraction was over 95% of the reflectivity of the uncut multilayer. We predict that such structures should also be effective at shorter x-ray wavelengths. Both the Laue (transmitting) and Bragg (reflecting) geometries are incorporated in our formalism, which is applied to the analysis of multilayer Laue lenses and focusing and dispersing Bragg optics.

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Section: Fabrication Of Sliced Multilayers a Low-stress Thick Multilsupporting

confidence: 84%

Section: Applications Of Sliced Multilayers a Monochromator Or Spectmentioning

confidence: 99%

High-efficiency x-ray gratings with asymmetric-cut multilayers

Bajt¹,

Chapman

Aquila³

et al. 2012

J. Opt. Soc. Am. A

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“…The basic principles of this optical element were formulated in [26]. Similar to a toroidal grating, an off-axis ZP diffracts different spectral components of the incident beam at different angles and focuses them into spatially separated spots.…”

Section: Introductionmentioning

confidence: 99%

Monochromatization of femtosecond XUV light pulses with the use of reflection zone plates

Metje¹,

Borgwardt²,

Moguilevski³

et al. 2014

Opt. Express

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Abstract:We report on a newly built laser-based tabletop setup which enables generation of femtosecond light pulses in the XUV range employing the process of high-order harmonic generation (HHG) in a gas medium. The spatial, spectral, and temporal characteristics of the XUV beam are presented. Monochromatization of XUV light with minimum temporal pulse distortion is the central issue of this work. Off-center reflection zone plates are shown to be superior to gratings when selection of a desired harmonic is carried out with the use of a single optical element. A cross correlation technique was applied to characterize the performance of the zone plates in the time domain. By using laser pulses of 25 fs length to pump the HHG process, a pulse duration of 45 fs for monochromatized harmonics was achieved in the present setup. R. Leone, "Ultrafast time-resolved soft X-Ray photoelectron spectroscopy of dissociating Br 2 ," Phys. Rev. Lett. 87, 193002 (2001 265-267 (1986

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“…Important areas of combined SR and multilayer applications are projection and contact x-ray microscopy in the \water window" range ( ¶ = 2.35 { 4.5 nm) [1], X-ray spectroscopy and microscopy using BraggFresnel elements [2,3]. Best quality multilayer mirrors have been used as generators of X-ray standing waves for investigation of structural properties of Blodgett-Langmuir lms [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Multilayer optics for XUV spectral region: technology fabrication and applications

et al. 2003

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We present research investigations in the eld of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed at the development of optical elements for applications in experiments in physics and in scienti c instrumentation. We discuss normal incidence multilayer optics in the spectral region of \water window", multilayer optics for collimation and focusing of hard X-rays, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography ( ¶ = 13nm) and short period multilayer optics.

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Principles of Bragg-Fresnel multilayer optics

Cited by 43 publications

References 16 publications

High-efficiency x-ray gratings with asymmetric-cut multilayers

High-efficiency x-ray gratings with asymmetric-cut multilayers

Monochromatization of femtosecond XUV light pulses with the use of reflection zone plates

Multilayer optics for XUV spectral region: technology fabrication and applications

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