The continuous increase of the average laser power of ultrafast lasers is a challenge with respect to the thermal load of the processing optics. The power which is absorbed in an optical element leads to a temperature increase, temperature gradients, changing refractive index and shape, and finally causes distortions of the transmitted beam. In a first-order approximation this results in a change of the focal position, which may lead to an uncontrolled change of the laser machining process. The present study reports on investigations on the focal shift induced in thin plano-convex lenses by a high-power ultra-short pulsed laser with an average laser power of up to 525 W. The focal shift was determined for lenses made of different materials (N-BK7, fused silica) and with different coatings (un-coated, broadband coating, specific wavelength coating).
= ⋅ ⋅is the irradiated area given by the diameter d b of the beam on the workpiece. Processing in the focal plane of the focusing optics is the most common approach, since the highest fluence can be achieved at this position. When the position of the beam waist shifts by one Rayleigh length due to thermally induced effects, the fluence on the workpiece at the original position of the nominal focal plane decreases by a factor of 2 [4]. As the applied fluence significantly influences the efficiency of e.g. surface ablation [5], the thermally induced focal shift can dramatically reduce the processing efficacy. When working close to the ablation threshold, as in the case of surface structuring [6], the ablation process can stop completely even for small changes of the focal position. During laser drilling, the