2019
DOI: 10.1016/j.precisioneng.2018.08.019
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Production of carbonized micro-patterns by photolithography and pyrolysis

Abstract: The preparation of carbon micro-patterns is reported in this paper. Different carbon micro-patterns were created using photolithography of the epoxy-based negative photoresist SU-8. Photoresist patterns were optimized in terms of resolution and aspect ratio and subsequently subjected to pyrolysis to obtain carbonized and conductive 3D structures. The latter step requires the optimization of the resist cross-linking time as well as the temperature and time of the resist post-bake. This step is crucial in order … Show more

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Cited by 25 publications
(11 citation statements)
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“…Nerve tissue engineering is focusing on neural cells implants, considering the limited recovery capacity from damage that distinguishes the central nervous system. The biological substitutes aiming at restoring or improving nerve tissue function compromised by neurodegenerative disorders are increasing over the past few years (Prabhakaran et al, 2009;Ginestra et al, 2017aGinestra et al, , 2019. Biocompatible scaffolds that mimic the biological environment of native Extra-Cellular Matrix (ECM) play an important role in supporting and regulating the differentiation of stem cells.…”
Section: Introductionmentioning
confidence: 99%
“…Nerve tissue engineering is focusing on neural cells implants, considering the limited recovery capacity from damage that distinguishes the central nervous system. The biological substitutes aiming at restoring or improving nerve tissue function compromised by neurodegenerative disorders are increasing over the past few years (Prabhakaran et al, 2009;Ginestra et al, 2017aGinestra et al, , 2019. Biocompatible scaffolds that mimic the biological environment of native Extra-Cellular Matrix (ECM) play an important role in supporting and regulating the differentiation of stem cells.…”
Section: Introductionmentioning
confidence: 99%
“…Photolithography is a popular technique for synthesizing and preparing bioinspired surfaces [ 44 ] using photosensitive materials called “photoresists” to form patterns on target plates. [ 45 ] After the negatives have been exposed to light, the photoresist hardens and becomes insoluble, while the area protected from light can be washed out (i.e., negative resist), and the bare metal can be etched to form a relief pattern on a substrate surface. The advantage of photolithography is that it can accurately control the shape and size of the patterns.…”
Section: Fabrication Techniquesmentioning
confidence: 99%
“…After the microchannels have been defined by the UV light, an inverse image of the mold is obtained using a polymer before binding to a glass substrate. The main advantage of this technique is that the chips are made with precise geometries within the channels and excellent surface smoothness is achieved [ 47 ]. The main disadvantages of this technique are that it requires a lot of time, use of toxic materials, and clean-room facilities [ 47 ].…”
Section: Fabrication Of Microfluidic Devices For Production Of Ionmentioning
confidence: 99%
“…The main advantage of this technique is that the chips are made with precise geometries within the channels and excellent surface smoothness is achieved [ 47 ]. The main disadvantages of this technique are that it requires a lot of time, use of toxic materials, and clean-room facilities [ 47 ]. As a result of diffraction, the lower resolution limit of this technology is 250 nm [ 48 ].…”
Section: Fabrication Of Microfluidic Devices For Production Of Ionmentioning
confidence: 99%