The physical-mechanical of properties of biocompatible calcium phosphate coatings deposited onto titanium and silicon substrates from erosion materials, which are generated by irradiating hydroxyapatite (synthetic and natural) targets by means of the high-power pulsed ion beam of a Temp-4 accelerator, are investigated. A calculation technique for predicting the rate and energy efficiency of deposition using pulsed ion beams is proposed. Their characteristics are analyzed as applied to the formation of calcium phosphate coatings