Properties of sputtered a-SiO :H alloys with a visible luminescence

Intense visible photoluminescence in amorphous SiOx and SiOx:H films prepared by evaporation

“…Amorphous silicon oxygen hydrogen alloys (a-SiO x :H͒ are also candidates for visible PL. They can be prepared by sputtering in water vapor 8 or by plasma enhanced chemical vapor deposition using a gas mixture of N 2 O and SiH 4 . 9,10 The purpose of this letter is to show that the evaporation technique also permits to obtain a-SiO x thin films which present a very intense PL visible to the naked eye.…”

Studies on the structural properties of SiO:H films prepared from (SiH4+CO2+He) plasma in RF-PECVD

“…It has been known for years that a-SiO:H exhibits visible photoluminescence [1][2][3] and has been applied in the p-i-n junction light-emitting diode [4]. In conventional c-Si solar cells, a-SiO:H has already been used as surface passivation layer [5].…”

Preparation and characterization of p-type hydrogenated amorphous silicon oxide film and its application to solar cell

“…Different a-SiOx:H materials have been prepared by various different methods by different research groups, of which plasma enhanced chemical vapor deposition (PECVD) [5,6] is a popular one. Different oxygen source gases have also been used in preparing aSiOx:H material, such as H 2 O [7,8], CO 2 [5,9,10], oxygen [11,12], or pure N 2 O [13,14].…”