Pulsed-laser deposition and boron-blending of diamond-like carbon (DLC) thin films

Kautek, Wolfgang; Pentzien, Simone; Conradi, Andrea; Krüger, Jörg; Brzezinka, Klaus‐Werner

doi:10.1016/s0169-4332(96)00443-6

Cited by 34 publications

(10 citation statements)

References 44 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Owing to these properties, DLCs are extensively used in diverse fields such as wear coatings, microelectronics, microtribology and biomedical technology. However their insulating properties and wide band gap lead to limitation of their applications in electronics (unless the charge carriers are incorporated into them [21][22][23][24][25]). Compounds with various boron to carbon stoichiometries and a the ratio higher than 2 are known as boron carbides.…”

Section: Introductionmentioning

confidence: 99%

RETRACTED: Application of the HFCVD technique for growth of nano-rods and nano-crystals

Elahi

Ghoranneviss

2015

Journal of Crystal Growth

View full text Add to dashboard Cite

Section: Introductionmentioning

confidence: 99%

RETRACTED: Application of the HFCVD technique for growth of nano-rods and nano-crystals

Elahi

Ghoranneviss

2015

Journal of Crystal Growth

View full text Add to dashboard Cite

“…DLC thin films with non-metal elements like N, B, Si, F incorporated have been developed using various deposition techniques, including pulsed laser deposition (Kautek et al, 1996), filtered cathodic arc deposition (Monteiro, 2001), biased target ion beam deposition (Sethuraman, 2009), direct current magnetron sputtering (Kahn et al, 2007), radio frequency plasma enhanced CVD (Hasebe et al, 2007) and plasma immersion ion implantation and deposition (Yao et al, 2004). The non-metal element doping into DLC provides improved film mechanical, tribological, thermal, electronic and biological properties.…”

Section: Non-metal Doped Dlcmentioning

confidence: 99%

“…These include MSIBD via alternating direct deposition of low energy mass-separated C ions and B ions (Ronning et al, 1995), pulsed laser deposition using a XeCl excimer laser of 308 nm wavelength and polycrystalline graphite and boron carbide targets (Kautek et al, 1996), filtered cathodic arc deposition with a mixed plasma stream from a B 4 C cathode and a graphite cathode as sources (Monteiro, 2001), non-balanced reactive magnetron direct current sputtering using B 4 C target as B source (Ahmad et al, 2007), radio frequency plasma enhanced CVD with CH 4…”

Section: Boron Doped Dlcmentioning

confidence: 99%

Synthesis and characterization of boron incorporated diamond-like carbon thin films

et al. 2015

View full text Add to dashboard Cite

Diamond-like carbon (DLC) thin films have been attracting significant interest from both academic and industrial communities due to their unique structures and properties. Boron (B) incorporation is very promising to modify DLC properties for electronic and mechanical applications. However, the current techniques suffer from their limitations and it's difficult to use them to prepare high quality B incorporated DLC (B-DLC) films to meet application demands. A recently developed biased target ion beam deposition (BTIBD) technique has been applied to produce high quality DLC based films, but no work has been reported on synthesis of B-DLC films by BTIBD and their characteristics.In this work, B-DLC films were synthesized on silicon wafers using BTIBD technique, where DLC was deposited by ion beam deposition and B was simultaneously incorporated by ion beam sputtering of boron carbide (B 4 C) under different conditions. DLC films and B-carbon (B-C) films were also synthesized by ion beam deposition and ion beam sputtering of B 4 C under similar conditions, respectively, as reference samples and for estimation of B 4 C sputtering rate and DLC deposition rate to control the B content in B-DLC. Scanning electron microscopy, atomic force microscopy, X-ray diffraction, Raman spectroscopy, synchrotron-based X-ray photoelectron spectroscopy and near edge X-ray absorption fine structure were applied to investigate morphology, microstructure, chemical composition and bonding state of the films.Nanoindentation and ball-on-disc tests were conducted using a Universal Mechanical Tester to measure hardness, Young's modulus and friction coefficient of the synthesized films. The preliminary relationships between processing conditions, film structures and properties were

show abstract

“…Various PVD and CVD techniques like biased target ion beam deposition [50], pulsed laser deposition [51], direct current magnetron sputtering [52], filtered cathodic arc deposition [29], plasma immersion ion implantation and deposition [53], and radio frequency plasma enhanced CVD [54] have been used to deposit DLC thin films with non-metal elements such as N, B, Si, F.…”

Section: Non-metal Doped Dlcmentioning

confidence: 99%

Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

Ashtijoo

Bhattacherjee

Sutarto

et al. 2016

Surface and Coatings Technology

View full text Add to dashboard Cite

The application of Polyethylene terephthalate (PET) has been steadily increasing during recent years. However, its low wear resistance, high gas permeation rate and poor biocompatibility have significantly limited its applications in some specific areas. On the contrary, diamond-like carbon (DLC) possesses many unique properties such as the high hardness, low friction coefficient, high transparency, good gas barrier, excellent biocompatibility, and low synthesis temperature, which makes it an ideal coating material for modifying the surfaces of PET for applications as food and beverage containers and biomedical implants. Nevertheless, the adhesion of DLC on PET is poor due to the high stress induced by ion bombardment during DLC deposition and the large mechanical property mismatch between the coating and the substrate. Therefore, it is very important to develop techniques to lower the stress of DLC and to enhance the adhesion strength of DLC to PET.In the present thesis work, low energy end-hall (EH) ion source and element (N and Si) doping were used to deposit DLC to lower its internal stress and ion beam treatment was performed to modify the surface of PET to enhance the adhesion between DLC and PET. In addition, two different hydrocarbon gases (CH 4 and C 2 H 2 ) were used as precursors for DLC deposition in order to understand the effect of precursor gas. The structure and properties of the treated PET and deposited DLC films were characterized by various advanced techniques: The adhesion of DLC to PET was assessed using scratch testing; the composition and bonding states of DLC and treated PET were analyzed by Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), and near edge X-ray absorption fine structure (NEXAFS); the hardness and Young's modulus were measured by nano-indentation; the tribological properties of the coated materials were evaluated by pin-on-disk sliding testing; and the surface tomography and surface roughness were investigated by atomic force microscopy and N forms sp 3 C-N and sp 2 C=N bonds in the films. Consequently, the hardness values decrease from 11.5 GPa for pure DLC to 7.0 GPa for N-DLC samples whereas the hardness of Si-DLC increases with increasing the silicon content. In addition, N doping can reduce residual stress of DLC and thus increases adhesion of DLC. The DLC films deposited using methane show better properties than using acetylene. By optimizing the conditions, dense, smooth, and adhesive DLC films have been deposited onto PET using EH ion source by combining N doping and O ion treatment with methane as precursor gas.iv AKNOWLEDGEMENTS

show abstract

Pulsed-laser deposition and boron-blending of diamond-like carbon (DLC) thin films

Cited by 34 publications

References 44 publications

RETRACTED: Application of the HFCVD technique for growth of nano-rods and nano-crystals

RETRACTED: Application of the HFCVD technique for growth of nano-rods and nano-crystals

Synthesis and characterization of boron incorporated diamond-like carbon thin films

Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

Contact Info

Product

Resources

About