Pulsed laser deposition of ZnO grown on glass substrates for realizing high-performance thin-film transistors

Yoshida, Tsutomu; Tachibana, Takayuki; Maemoto, Toshihiko; Sasa, Shigehiko; Inoue, M.

doi:10.1007/s00339-010-5973-9

Cited by 21 publications

(13 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Up to now, 1D ZnO nanostructures can be obtained by many methods such as chemical vapor deposition (CVD) [21], pulsed laser deposition (PLD) [22], hydrothermal synthesis [23], and electrochemical deposition [24][25][26]. Compared with synthesis methods mentioned above, which usually require high temperature, high vacuum, catalysts, and high pressure, electrochemical deposition is more attractive, as it does not require all these rigorous conditions and complex operation and can be operated at low processing temperature in a few minutes or hours.…”

Section: Introductionmentioning

confidence: 99%

Nucleation effect and growth mechanism of ZnO nanostructures by electrodeposition from aqueous zinc nitrate baths

Sun

Jiao

Zhang

et al. 2012

Journal of Crystal Growth

View full text Add to dashboard Cite

Section: Introductionmentioning

confidence: 99%

Nucleation effect and growth mechanism of ZnO nanostructures by electrodeposition from aqueous zinc nitrate baths

Sun

Jiao

Zhang

et al. 2012

Journal of Crystal Growth

View full text Add to dashboard Cite

“…Therefore, the oriented growth of ZnO is not induced by the TiO 2 nanowire array, but is actually a characteristic of the PLD procedure. Thin films of ZnO deposited on various substrates have been reported to be epitaxial with preferred orientation along (002) direction [19][20][21]. In the current investigation, the remarkable orientation along (002) is also achieved on polycrystalline Ti foils.…”

Section: Photocatalytic Activity Evaluationmentioning

confidence: 57%

Conformal growth of ZnO on TiO2 nanowire array for enhanced photocatalytic activity

Tao¹,

Wu²,

Xiao³

et al. 2013

Applied Surface Science

View full text Add to dashboard Cite

Highlights TiO 2 nanowire array is achieved by direct oxidation of Ti in H 2 O 2 solution at a low temperature of 80 C. A subsequent pulsed laser deposition of ZnO on the TiO 2 nanowire array achieves core-shell TiO 2 /ZnO nanoarrays. The PLD ZnO layer is oriented grown to exhibit an abnormal strong X-ray peak corresponding to (002). The composite film exhibits improved photocurrent and photocatalytic activity.

show abstract

“…Thus, the deposition rate and the kinetic energy of ejected species background gas molecules and the ablated species. Owing to the different optimum regimes of oxygen pressure and substrate temperature, a two-step buffer layer was deposited at a low pressure or low temperature, and then high temperature [101,102]. This method will reduces the surface roughness ScMgAlO 4 ) with a close lattice match to ZnO can also improve the crystallinity and reduce the defect densities and increase the Hall mobility up to 440 cm 2 [105].…”

Section: Growth Of Zno Thin Filmsmentioning

confidence: 99%

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Peng¹,

Luo²,

Fu³

2018

Functional Materials and Electronics

View full text Add to dashboard Cite

Progress in ZnO thin films and nanostructures for the acoustic wave microfluidic and sensing applications are reviewed in this chapter. ZnO thin films with good piezoelectric properties possess large electromechanical coupling coefficients and can be fabricated for the surface acoustic wave (SAW) and film-bulk acoustic resonator (FBAR) devices with a good acoustic performance. The SAWs can be excited to mix, stream, pump, eject, and atomize the liquid, and precision sensing can be performed using SAWs and FBARs. Therefore, the ZnO SAW devices are attractive to be integrated into a labon-chip system where the SAWs can transport bio-fluids to the desired area, mix the extracted DNA or proteins, and detect the changes of the signals using SAWs or FBARs. The ZnO SAW and FBAR devices in combination with different sensing layers could also be used to successfully detect gas, UV light, and biochemicals with remarkable sensitivities. 5.1 INTRODUCTION Zinc oxide (ZnO) is a binary compound via a covalent bonding between the transition-metal zinc atom and oxygen atom. ZnO thin films and nanostructures are multifunctional materials, which have attracted much attention from as early as 1930s until today due to various fundamental electronic, years, the development of new growth technologies of ZnO thin films and nanostructures and their new applications has renewed lots of interest on investigation of their growth mechanism, band structures, excitons, and deep centers in luminescence, nonlinear optics, and UV lasing [8,9]. With in-depth understanding of the semiconducting, optical, electronic, piezoelectric, and pyroelectric properties, ZnO has now been widely applied for microfluidics, These immense applications also have boosted the extensive researches on the fundamentals and growth techniques of the ZnO-based materials. typically at micron and submicron dimensions in a miniaturized system and the corresponding technologies for such systems. This multidisciplinary technology is comprehensively based on physics, nanotechnology, biotech-ZnO Thin Films and Nanostructures for Acoustic 197 the developments of the inkjet print-heads, DNA chips, and lab-on-a-chip is conveniently handled through generating, transporting, separating, consumption, high-throughput, compactness, high sensitivity, fast response, at microscale has been supported with the urgent needs from healthcare, medical research, life science, drug-development sectors. However, the and phenomena become dominant at a microscale level, such as capillary forces, surface roughness and undesired chemical interactions. These may be

show abstract

Pulsed laser deposition of ZnO grown on glass substrates for realizing high-performance thin-film transistors

Cited by 21 publications

References 5 publications

Nucleation effect and growth mechanism of ZnO nanostructures by electrodeposition from aqueous zinc nitrate baths

Nucleation effect and growth mechanism of ZnO nanostructures by electrodeposition from aqueous zinc nitrate baths

Conformal growth of ZnO on TiO2 nanowire array for enhanced photocatalytic activity

Zno Thin Films and Nanostructures for Acoustic Wave-Based Microfluidic and Sensing Applications

Contact Info

Product

Resources

About