2001
DOI: 10.1016/s0925-4005(01)00637-2
|View full text |Cite
|
Sign up to set email alerts
|

Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
22
0
1

Year Published

2005
2005
2021
2021

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 26 publications
(23 citation statements)
references
References 11 publications
0
22
0
1
Order By: Relevance
“…B. auch die Verteilung von leitenden und isolierenden Regionen auf mikrostrukturierten Transducern für die elektrochemische Analytik. [245,[247][248][249][250][251][252][253][254] Dies gilt auch dann, wenn die elektrochemisch aktiven Regionen in Poren verborgen und daher für andere Techniken wie SFM nicht zugänglich sind. Ebenfalls möglich ist eine lokale Charakterisierung der Elektronentransferkinetik nach unterschiedlichen Prozessschritten, die z.…”
Section: Untersuchung Von Elektrodenmaterialienunclassified
“…B. auch die Verteilung von leitenden und isolierenden Regionen auf mikrostrukturierten Transducern für die elektrochemische Analytik. [245,[247][248][249][250][251][252][253][254] Dies gilt auch dann, wenn die elektrochemisch aktiven Regionen in Poren verborgen und daher für andere Techniken wie SFM nicht zugänglich sind. Ebenfalls möglich ist eine lokale Charakterisierung der Elektronentransferkinetik nach unterschiedlichen Prozessschritten, die z.…”
Section: Untersuchung Von Elektrodenmaterialienunclassified
“…Reducing the diameter of disk electrodes is one of the most common, which can be implemented by sealing of wires, with a diameter in the micrometer range, into an insulating material such as glass, followed by grinding. More scalable fabrication techniques are lithography [4][5][6][7] and screen printing [8] . An alternative approach, which is a cost-effective compromise possessing both convergent diffusion and high output signal, is the microband geometry [9] .…”
Section: Introductionmentioning
confidence: 99%
“…Minute water droplets could be dispensed on the wafer, but they are difficult to produce and control. Nevertheless, wafer-level testing solutions have been suggested where drops are dispensed on the wafer by an ink-jet system and the wetting is controlled by a hydrophobic passivation layer [3]. Alternatively capillary forces can be used to prevent wetting.…”
Section: Introductionmentioning
confidence: 99%
“…Alternatively capillary forces can be used to prevent wetting. Cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical impedance spectroscopy for wafer-level quality control of microelectrodes are also discussed in [3]. It is further conceivable to design a measurement set-up with a vertical or tilted wafer or chip orientation.…”
Section: Introductionmentioning
confidence: 99%