Quality Factor and Coupling in Piezoelectric MEMS Resonators

Abdolvand, Reza; Fatemi, Hedy; Moradian, Siamak

doi:10.1007/978-3-319-28688-4_5

Cited by 14 publications

(6 citation statements)

References 70 publications

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“…Expanding our model with anchor loss simulations, in order to improve the accuracy and also investigate the origin of the additonal damping contributions at high eigenfrequencies, will be subject of future research. Finally, as our method is based on FEM, it can be readily applied to other MEMS and NEMS structures where quality factors and damping mechanisms are also subject of ongoing research [39][40][41] . We would like to emphasize that, although our discussion was focused on high-frequency modes, our method is generally applicable also for low-frequency modes.…”

Section: Discussionmentioning

confidence: 99%

Thermoelastic damping in MEMS gyroscopes at high frequencies

2023

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Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g., in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high-frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high-frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high-frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano- and micromechanical systems.

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Section: Discussionmentioning

confidence: 99%

Thermoelastic damping in MEMS gyroscopes at high frequencies

2023

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“…Finally, as our method is based on FEM, it can be readily applied to other MEMS and NEMS structures where quality factors and damping mechanisms are also subject of ongoing research [38][39][40].…”

Section: Discussionmentioning

confidence: 99%

Thermoelastic Damping in MEMS Gyroscopes at High Frequencies

Schiwietz¹,

Weig²,

Degenfeld-Schonburg³

2022

Preprint

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Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano-and micromechanical systems.

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“…

is the EM wavelength at the excitation signal frequency (assuming the frequency of excitation signal matches either MEMS resonance mode) and

represents the total power lost in the sensor. Sources of loss include impedance mismatch between the resonator and antenna, Ohmic loss, dielectric loss, and losses occurring in the MEMS resonator [ 27 ]. Modifying the Friis equation for ringdown sensor measured using FFT windowing, the power of the sensor’s response as received by the oscilloscope can be calculated as:

…”

Section: Systems Components and Methodsmentioning

confidence: 99%

A Battery-Less Wireless Respiratory Sensor Using Micro-Machined Thin-Film Piezoelectric Resonators

et al. 2021

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In this work, we present a battery-less wireless Micro-Electro-Mechanical (MEMS)-based respiration sensor capable of measuring the respiration profile of a human subject from up to 2 m distance from the transceiver unit for a mean excitation power of 80 µW and a measured SNR of 124.8 dB at 0.5 m measurement distance. The sensor with a footprint of ~10 cm2 is designed to be inexpensive, maximize user mobility, and cater to applications where disposability is desirable to minimize the sanitation burden. The sensing system is composed of a custom UHF RFID antenna, a low-loss piezoelectric MEMS resonator with two modes within the frequency range of interest, and a base transceiver unit. The difference in temperature and moisture content of inhaled and exhaled air modulates the resonance frequency of the MEMS resonator which in turn is used to monitor respiration. To detect changes in the resonance frequency of the MEMS devices, the sensor is excited by a pulsed sinusoidal signal received through an external antenna directly coupled to the device. The signal reflected from the device through the antenna is then analyzed via Fast Fourier Transform (FFT) to extract and monitor the resonance frequency of the resonator. By tracking the resonance frequency over time, the respiration profile of a patient is tracked. A compensation method for the removal of motion-induced artifacts and drift is proposed and implemented using the difference in the resonance frequency of two resonance modes of the same resonator.

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Quality Factor and Coupling in Piezoelectric MEMS Resonators

Cited by 14 publications

References 70 publications

Thermoelastic damping in MEMS gyroscopes at high frequencies

Thermoelastic damping in MEMS gyroscopes at high frequencies

Thermoelastic Damping in MEMS Gyroscopes at High Frequencies

A Battery-Less Wireless Respiratory Sensor Using Micro-Machined Thin-Film Piezoelectric Resonators

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