Quantitative measurements of sp3 content in DLC films with Raman spectroscopy

Cui, Wang-jun; Lai, Q.B.; Zhang, L.; Wang, Fu Ming

doi:10.1016/j.surfcoat.2010.08.093

Cited by 205 publications

(86 citation statements)

References 35 publications

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“…As an example, an empirical relation linking the sp 3 content to the G band dispersion was derived for as-deposited amorphous carbons [29] which however fails to extract the sp 3 content for heated amorphous carbons. In addition, some care has to be taken in using formulae relating is linearly related to the sp 3 content [30].…”

Section: Validity Of Empirical-based Raman Modelsmentioning

confidence: 99%

“…Due to the extremely good sensitivity on structural modifications involving sp 2 carbons, Raman spectroscopy analysis has been associated to most of the last studies on a:C-H materials [3,4,17,19,[23][24][25][26][27][28][29][30]. The reason behind this high sensitivity is the resonance phenomena between the laser wavelength excitation used and a local band gap of a given sp 2 cluster in the amorphous carbon.…”

Section: Introductionmentioning

confidence: 99%

“…The evolution of physical and chemical parameters as function of the annealing time are discussed from a macroscopic point of view in section 4, together with their evolutions as a function of the distance between the electron probe and the substrate. Finally, the pertinence of empirical models used by the Raman community for quantitatively linking the sp 2 fraction with the evolution of Raman parameters [29,30] will be reviewed. To sum up, these works demonstrate and illustrate the perfect coupling of these local and macroscopic analyses for a proper study of such complex materials.…”

Section: Introductionmentioning

confidence: 99%

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Advanced spectroscopic analyses on a:C-H materials: Revisiting the EELS characterization and its coupling with multi-wavelength Raman spectroscopy

Lajaunie

Pardanaud

Martin

et al. 2017

Carbon

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Hydrogenated amorphous carbon thin films (a:C-H) are very promising materials for numerous applications. The growing of relevance of a:C-H is mainly due to the long-term stability of their outstanding properties. For improving their performances, a full understanding of their local chemistry is highly required. Fifteen years ago, electron energy-loss spectroscopy (EELS), developed in a transmission electron microscope (TEM), was the technique of choice to extract such kind of quantitative information on these materials. Other optical techniques, as Raman spectroscopy, are now clearly favored by the scientific community. However, they still lack of 2 the spatial resolution offered by TEM-EELS. In addition, nowadays, the complexity of the physics phenomena behind EELS is better known. Here, a:C-H thin films have been isothermally annealed and the evolution of their physical and chemical parameters have been monitored at the local and macroscopic scales. In particular, chemical in-depth inhomogeneities and their origins are highlighted. Furthermore, a novel procedure to extract properly and reliably quantitative chemical information from EEL spectra is presented. Finally, the pertinence of empirical models used by the Raman community is discussed. These works demonstrate the pertinence of the combination of local and macroscopic analyses for a proper study of such complex materials.

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Section: Validity Of Empirical-based Raman Modelsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Advanced spectroscopic analyses on a:C-H materials: Revisiting the EELS characterization and its coupling with multi-wavelength Raman spectroscopy

Lajaunie

Pardanaud

Martin

et al. 2017

Carbon

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“…These peaks are referred to in the literature as a peak derived from the disordered phase (D) and a peak derived from sp 2 hybridized bonds (G) [15]. Based on the analysis of the spectrum it can be noticed that it is typical of carbon DLC coatings and the powder presents a similar phase composition [16].…”

Section: Initial Powdersmentioning

confidence: 99%

CVD carbon powders modified by ball milling

Kaźmierczak

Kaczorowski

Niedzielski

2015

Materials Science-Poland

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Carbon powders produced using a plasma assisted chemical vapor deposition (CVD) methods are an interesting subject of research. One of the most interesting methods of synthesizing these powders is using radio frequency plasma. This method, originally used in deposition of carbon films containing different sp 2 /sp 3 ratios, also makes possible to produce carbon structures in the form of powder. Results of research related to the mechanical modification of these powders have been presented. The powders were modified using a planetary ball mill with varying parameters, such as milling speed, time, ball/powder mass ratio and additional liquids. Changes in morphology and particle sizes were measured using scanning electron microscopy and dynamic light scattering. Phase composition was analyzed using Raman spectroscopy. The influence of individual parameters on the modification outcome was estimated using statistical method. The research proved that the size of obtained powders is mostly influenced by the milling speed and the amount of balls. Powders tend to form conglomerates sized up to hundreds of micrometers. Additionally, it is possible to obtain nanopowders with the size around 100 nm. Furthermore, application of additional liquid, i.e. water in the process reduces the graphitization of the powder, which takes place during dry milling.

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“…In past years, DLC films have been extensively used for tribological application in many areas, such as mechanical parts, optical devices, magnetic storage disks and biomedical parts [6][7][8][9]. In current hard disk drive technology, DLC films have been used as protective overcoat on the head and disk surfaces in magnetic storage devices [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Mechanical Properties of Composite SiNx/DLC Films Prepared by Filtered Cathodic Arc of Graphite Incorporated with RF Sputtering of Silicon Nitride

Bunnak¹,

Gong²,

Limsuwan³

et al. 2013

MSA

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Composite SiN x /DLC films were deposited on Si substrate by RF magnetron sputtering of silicon nitride (Si 3 N 4 ) target simultaneously with filtered cathode arc (FCA) of graphite. The RF power was fixed at 100 W whereas the arc currents of FCA were 20, 40, 60 and 80 A. The effects of arc current on the structure, surface roughness, density and mechanical properties of SiN x /DLC films were investigated. The results show that the arc current in the studied range has effect on the structure, surface roughness, density and mechanical properties of composite SiN x /DLC films. The composite SiN x /DLC films show the sp 3 content between 53.5% and 66.7%, density between 2.54 and 2.98 g/cm 3 , stress between 1.7 and 2.2 GPa, and hardness between 35 and 51 GPa. Furthermore, it was found that the density, stress and hardness correlate linearly with the sp 3 content for composite SiN x /DLC films.

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Quantitative measurements of sp3 content in DLC films with Raman spectroscopy

Cited by 205 publications

References 35 publications

Advanced spectroscopic analyses on a:C-H materials: Revisiting the EELS characterization and its coupling with multi-wavelength Raman spectroscopy

Advanced spectroscopic analyses on a:C-H materials: Revisiting the EELS characterization and its coupling with multi-wavelength Raman spectroscopy

CVD carbon powders modified by ball milling

Mechanical Properties of Composite SiNx/DLC Films Prepared by Filtered Cathodic Arc of Graphite Incorporated with RF Sputtering of Silicon Nitride

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