1993
DOI: 10.1002/sia.740200302
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Quantitative XPS. Part I: Experimental determination of the relative analyser transmission function of two different spectrometers — a critical assessment of various methods, parameters involved and errors introduced

Abstract: The relative analyser trailsmission functions of two different XPS spectrometers (VG ESCA-3 Mk I1 and SSI X-F'robe of Fisons) have been determined experimentally by several methods presented in the literature. The transmission function of the VG ESCA-3 Mk I1 can be expressed as T cc En(E,/Ek)", where n is close to 0.8. The transmission function T of the SSI X-Probe cannot be presented as a separate function of En and Ek and it is expressed asThe possible influence of the efficiency D of the detector on the det… Show more

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Cited by 63 publications
(21 citation statements)
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“…The latter takes into account the cross-section taken from Scoffield and the kinetic energy dependence (E k 0.7 ). 38,39 Only average values recorded from two samples are presented.…”
Section: Xps (Esca)mentioning
confidence: 99%
“…The latter takes into account the cross-section taken from Scoffield and the kinetic energy dependence (E k 0.7 ). 38,39 Only average values recorded from two samples are presented.…”
Section: Xps (Esca)mentioning
confidence: 99%
“…The relative loss of F during these long exposures ͑up to 4 h͒ to the x-ray beam was checked on samples with high F concentration to be less than 10%. The influence of analyzer energy on peak intensities was corrected by accounting for the spectrometer transmission function that was determined with method V given in Weng et al 31,32 Surface concentrations were derived from corrected intensities by the use of sensitivity factors provided by the spectrometer manufacturer. The concentration of F in the oxide layer was calculated as ͓F͔ oxide (%)ϭ100 I F ls…”
Section: Methodsmentioning
confidence: 99%
“…For the reconstruction of the diffraction pattern it must be considered that for every energy analyzer the recorded photoelectron intensity is proportional to a device specific transmission function that will also depend on the particular mode of operation [16]. Due to the two dispersive axes (angle and energy) the transmission function of the WAL detector depends on energy and detector angle, and therefore I(E, α) ∝ T (E, α).…”
Section: Reconstruction Of Complete Diffraction Patterns From Single mentioning
confidence: 99%