Quartz Crystal Double-Ended Tuning Fork Resonator for High Resolution Force Sensing

Wang, Jian; Zhao, Cong; Zhang, Shi Ming; Zou, Jiang

doi:10.4028/www.scientific.net/kem.609-610.1181

Cited by 4 publications

(2 citation statements)

References 2 publications

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“…Quartz is a piezoelectric and high-Q material; therefore, a quartz resonator has high precision and good stability. Among the many available resonant sensors, quartz double ended tuning fork (DETF) is one of the widely used resonators with high performance due to its simple structure, excellent material characteristics and piezoelectricity property of quartz [4,5].…”

Section: Introductionmentioning

confidence: 99%

The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

Zhang

Zhao

et al. 2021

J. Micromech. Microeng.

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Due to the excellent material properties of crystal quartz and its simple and effective structure, the quartz double ended tuning fork (DETF) is widely used as a resonance sensing element in resonator sensors, where its quality factor has an important effect on the overall accuracy and stability of such sensors. To optimise the quality factor of quartz DETF, the influence of structural dimensions on structural and air damping is analysed, and the theoretical model used to calculate the quality factor is summarised. Further, under the premise of fabricating resonators with sufficient force–frequency sensitivity, the quality factors of quartz DETFs of different structural dimensions are simulated through finite element simulation. The theoretical model and simulation calculation of the quality factor of quartz DETFs mutually verify its effectiveness. Moreover, an experimental platform was built, and three quartz DETFs with different dimensions were fabricated to test their quality factor. The quality factors of the three DETFs in air and vacuum are 3467.3, 1925.8, 4442.4 and 32 997.6, 11 559.1, 24 795.7, respectively, which means that the environmental factors and their structural dimensions have a great influence on quality factor. With the simulation method and summarised theoretical model in this paper, the quality factor was studied with comprehensive structural damping (thermal damping loss and support loss) and air damping (resistance damping, slide film damping, and squeeze film damping). The influence of the structure size on the quality factor was analysed in detail, including the length of the decoupling region, the distance between the tines, and the length and width of the tines, and the main influencing factors were obtained, providing a basic and comprehensive reference for designing quartz DETF.

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Section: Introductionmentioning

confidence: 99%

The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

Zhang

Zhao

et al. 2021

J. Micromech. Microeng.

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“…And a thick back cavity structure is used to attenuate the effect of mounting stress on DETF resonator. Figure 2 shows the schematic drawing of the quartz crystal DETF resonator with vibration attenuation structure and the electrode distribution on the DETF resonator [5]. The DETF length and width are in the y and x direction of the Z-cut quartz crystal wafer, respectively.…”

Section: Device Designmentioning

confidence: 99%

High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

Wang

Zhao

Han

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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This paper reports a high accuracy oil-filled MEMS absolute pressure sensor based on quartz crystal double-ended tuning fork (DETF) resonator, which is suitable for application in ocean, petroleum, meteorological, aerospace and spacecraft field, etc. The pressure sensing unit is mainly composed of DETF resonator, diaphragm and back cavity structure. These pieces are all fabricated by quartz crystal using MEMS process, and are bonded together as 'sandwich' structure to form the absolute pressure sensing unit using glass frit under low temperature and vacuum condition. This process could effectively eliminate the thermal stress effect and form the reference vacuum cavity. The isolated packaged pressure sensor is composed of corrugated stainless steel diaphragm, silicone oil, pressure sensing unit and ceramic base package. The experimental results show that the accuracy is up to ±0.033% FS in the pressure range 0~300 kPa over the temperature range −20 °C~+45 °C.

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All-Quartz High Accuracy MEMS Pressure Sensor Based on Double-Ended Tuning Fork Resonator

Wang¹,

Zhao²,

Zhao³

et al. 2015

Procedia Engineering

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This paper reports an all-quartz high accuracy MEMS absolute pressure sensor based on high Q double-ended tuning fork (DETF) resonator, which is suitable for application in automotive, petroleum, meteorological, aerospace and spacecraft field. etc. The main parts of the MEMS pressure sensor, including the DETF resonator, diaphragm and back cavity structure, are all fabricated by quartz crystal using MEMS process. These pieces are bonded together as 'sandwich' structure to form the absolute pressure sensing unit using glass paste under low temperature and vacuum condition. This process could effectively eliminate the thermal stress effect and form the reference vacuum cavity. The experimental results show that the quality factor of the DETF resonator is up to 61000, the sensitivity is up to 7.35Hz/kPa in the operating range 0~250kPa, the pressure error is only 0.021%FS over the temperature range -40 ~+60 .

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Quartz Crystal Double-Ended Tuning Fork Resonator for High Resolution Force Sensing

Cited by 4 publications

References 2 publications

The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification

High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

All-Quartz High Accuracy MEMS Pressure Sensor Based on Double-Ended Tuning Fork Resonator

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