“…The chamber can be modelled as a single‐input, single‐output cavity. By combining the gas state equation, internal energy equation, and thermodynamic equation based on the laws of thermodynamics, the pressure model of the cavity can be obtained as Equation () [
10].
where
is the volume of the cavity, R is the gas constant, T , h ,
represent the temperature, the enthalpy, and the heat capacity in the cavity, respectively.…”