R.f. sputtered epitaxial ZnO films on sapphire for integrated optics

Paradis, E. L.; Shuskus, A. J.

doi:10.1016/0040-6090(76)90220-0

Cited by 79 publications

(7 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In particular, zinc oxide is a potential low‐cost alternative, which is readily available and has a high chemical stability in reduction environments. Therefore, well‐oriented ZnO and aluminum‐doped zinc oxide (AZO) films have been grown on single crystalline substrates such as sapphire, 1–4 MgO, 3 and more recently on lattice‐matched ScAlMgO 4 5–7 substrates. The applications of these films are, however, restricted because of the use of special single‐crystalline substrates.…”

Section: Introductionmentioning

confidence: 99%

Crystallographic Orientation in Pure and Aluminum‐Doped Zinc Oxide Thin Films Prepared by Sol–Gel Technique

Tahar

2005

Journal of the American Ceramic Society

View full text Add to dashboard Cite

Novel sol-gel processes for the preparation of grain-oriented thin films of pure and aluminum-doped zinc oxide (AZO) are reported. Using various stabilizing ligands, oxide films with different degree of c-axis orientation could be prepared on amorphous substrates. The origin of orientation in sol-gel-derived ZnO and AZO films is investigated. The texture selection of ZnO films is independent of the heat-treatment schedule but sensitive to the precursor system. The electrical properties of the films do not depend significantly on the crystallographic orientation. The film visible transmittance remained higher than 90% even after vacuum annealing.

show abstract

Section: Introductionmentioning

confidence: 99%

Crystallographic Orientation in Pure and Aluminum‐Doped Zinc Oxide Thin Films Prepared by Sol–Gel Technique

Tahar

2005

Journal of the American Ceramic Society

View full text Add to dashboard Cite

show abstract

“…Various applications of 1D ZnO nanostructures are reported in the literature such as room-temperature UV lasers, 1 chemical and bio sensors, 2 3 photocatalysts, 4 solar cells, 5 etc. Moreover, it is also a promising material for the fabrication of different efficient nanodevices such as acoustic optical devices, 6 piezoelectric devices, 7 field effect transistors, 8 field-emitters, 9 nanoresonators, 10 nanocantilevers, 11 optical switches, 12 optical waveguides 13 and acoustic-optical devices, 14 and so on. Heretofore, variety of ZnO nanostructures have been prepared using various fabrication techniques and reported in the literature, for instance nanowires, 15-17 nanostars, 18 nanorods, 19 hexagonal nanocolumns and * Author to whom correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

Two-Step Growth of Hexagonal-Shaped ZnO Nanowires and Nanorods and Their Properties

Umar¹,

Kim²,

Kim³

et al. 2007

j nanosci nanotechnol

View full text Add to dashboard Cite

Single-crystalline with perfect hexagonal-shaped ZnO nanowires and nanorods, possessing the Zn-terminated (0001) facets bounded with the six-crystallographic equivalent [0110] surfaces, have been grown on Au-coated silicon substrate via thermal evaporation method using the metallic zinc powder in presence of oxygen. The detailed structural analyses reveal that the obtained nanostructures are single-crystalline with the wurtzite hexagonal phase and are preferentially oriented in the c-axis, [0001] direction. Raman spectra exhibit a sharp and strong optical phonon E2 mode at 437 cm(-1) further confirms the good crystal quality with wurtzite hexagonal crystal structure for the deposited products. The room-temperature photoluminescence (PL) spectra, for both the structures, showed a sharp and strong UV emission with a suppressed green emission, indicating the good optical properties for the as-grown nanostructures.

show abstract

“…Highly oriented ZnO-based thin films have generally been deposited on single crystalline substrates such as sapphire, [6][7][8][9][10][11][12][13] MgO, 8 LiNbO 3 , 14 and on lattice-matched GaN 12,15 and ScAlMgO 4 16-18 substrates. The applications of these films are, however, restricted because of the use of special single-crystalline substrates.…”

Section: Introductionmentioning

confidence: 99%

Effects of Individual Layer Thickness on the Microstructure and Optoelectronic Properties of Sol–Gel‐Derived Zinc Oxide Thin Films

Tahar

Salah

et al. 2008

Journal of the American Ceramic Society

View full text Add to dashboard Cite

Zinc oxide (ZnO) thin films were prepared under different conditions on glass substrates using a sol–gel process. The microstructure of ZnO films was investigated by means of diffraction analysis, and plan‐view and cross‐sectional scanning electron microscopy. It was found that the preparation conditions strongly affected the structure and the optoelectronic properties of the films. A structural evolution in morphology from spherical to columnar growth was observed. The crystallinity of the films was improved and columnar film growth became more dominant as the zinc concentration and the substrate withdrawal speed decreased. The individual layer thickness for layer‐by‐layer homoepitaxy growth that resulted in columnar grains was <20 nm. The grain columns are grown through the entire film with a nearly unchanged lateral dimension through the full film thickness. The columnar ZnO grains are c‐axis oriented perpendicular to the interface and possess a polycrystalline structure. Optical transmittance up to 90% in the visible range and electrical resistivity as low as 6.8 × 10−3·Ω·cm were obtained under optimal deposition conditions.

show abstract

R.f. sputtered epitaxial ZnO films on sapphire for integrated optics

Cited by 79 publications

References 13 publications

Crystallographic Orientation in Pure and Aluminum‐Doped Zinc Oxide Thin Films Prepared by Sol–Gel Technique

Crystallographic Orientation in Pure and Aluminum‐Doped Zinc Oxide Thin Films Prepared by Sol–Gel Technique

Two-Step Growth of Hexagonal-Shaped ZnO Nanowires and Nanorods and Their Properties

Effects of Individual Layer Thickness on the Microstructure and Optoelectronic Properties of Sol–Gel‐Derived Zinc Oxide Thin Films

Contact Info

Product

Resources

About