“…The energy detector resolution was 25 keV, the depth resolution was ≈35 nm. To study the fluence dependence on CIS system composition of the group B, samples were affected by the 40 keV Xe + ion irradiation with the fluences: 1 × 10 13 , 3 × 10 13 , 10 14 , 3 × 10 14 , 10 15 , 3 × 10 15 cm −2 [11]. To determine the composition of the subsurface layer samples (behind the damage layer, the analyzed depth was ≈65 nm), we used the iteration method [21].…”