Raman, Dielectric and Optical Investigations of DLC Thin Films

Abstract

Diamond-like carbon, DLC, thin films which is an amorphous hydrogenated form of carbon, a-C:H , has been synthesized by CVD method. SEM imaging, back-scattering Raman spectroscopy and reflected FT-IR spectroscopy have been used for characterization of the synthesized thin films. Kramers–Kronig dispersion relations have been used for the calculation of dielectric and optical parameters, which include the real and imaginary parts of the refractive and dielectric indices. In Raman spectroscopy, two obvious, wide and almost symmetrical peaks around 1355 cm-1 (D mode) and 1520–1550 cm-1 (G mode), clarify the formation of a-C:H thin film. Reflected spectra of thin films, in the spectral region of 400–4000 cm-1, have been recorded by the near normal FTIR reflection spectroscopy and show some peaks which can be assigned to the bending of sp3 C–C , sp3 or sp2 CH . The calculated data show that dielectric and optical parameters are almost independent of wavenumber.

Effect of nanosilica on the dielectric properties and thermal stability of polyimide/SiO2nanohybrid

“…The results are collected in Table 2 and a representative curve is shown in Figure 3. It is worth to mention that Kramers-Kronig relations and reflected spectra of thin films, in the spectral region of 400-4000 cm À1 , recorded by the near normal FT-IR reflection spectroscopy have been known as a method for the determination of dielectric parameters of solids [32,35,36].…”

Laser Micro-Raman Spectroscopy of CVD Nanocrystalline Diamond Thin Film

“…Laser micro-Raman spectroscopy is an ideal tool for assessment and characterization of various types of carbon-based materials [1], such as graphene, carbon nanotube [2], nanocrystalline diamond (NCD with the grain sizes less than 100 nm) and ultrananocrystalline diamond (UNCD with grain sizes less than 10 nm) powders [3] [4], NCD films [5], microcrystalline diamond films, single crystal diamond [6], single crystal graphite, polycrystalline graphite, and diamond-like carbon [7]. Indeed, this kind of spectroscopy is sensitive, nondestructive, fast and useful measurement tool based on lasermatter interaction [8].…”

Numerical study of the DLC film flow field in the ECR-PECVD reaction chamber

“…through experiments, such as optical Raman spectroscopy and reflected FT-IR spectroscopy [8,9]. The current work studies the ECR-PECVD of the DLC film via a numerical method to seek for the optimum reaction parameters, based on full understanding of the flow field characteristics.…”